Glossary of Terms

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13.56 MHz2.45 GHz27.12 MHz40 kHzABSAbsorptionAccessoriesAcetoneAcidAcrylicActivated carbonActivationActive gasActive speciesAdditive manufacturingAdhesionAdhesion promotersAdhesiveAdhesive strengthAdsorptionAdvanced compositesAdvanced compositesAFMAggregate stateAgilonAir plasmaAlodiningAluminiumAluminium oxideAmino acidAmorphousAmphiphilicAnionAnisotropicAnodeAnodic bondingAnti-adhesiveAnti-fingerprintAntiseptic cleaningArgonAsbestosAsbestos analysisAshingAspect ratioAtmosphereAtmospheric pressure plasmaAtomAuger effectAutomationBandgapBarrel plasma etcherBarrel reactorBarrier coatsBasic material for printed circuit boardsBenzeneBias voltageBlendsBlockingBlow-extrusion filmsBond-wireBondingBonding energyBorosilicate glassBranching (polymer chemistry)Car manufacturingCar paintCarbonCarbon fibresCarburisationCatheterCathodeCathode fallCationCavity magnetronCCRFCDECeramicsCF4ChamberCharge exchange collisionChemical etchingChemical reactionChemical reductionChemisorptionChipChip packagingChromic-sulphuric acidChromiumClean-roomCleaningCleaning aluminiumCleaning copperCleaning in a drumCoat thicknessCoatingCoating of plastic partsCoating processesCoating technologyCOCsCohesionCoil coatingCold plasmaColour fastnessColour of the plasmaComposite materialConductorsContact angleContact angle adjustmentContact powerContaminationControlCopolymerCopperCoronaCorona dischargeCorona treatmentCorrosionCovalent bondCrater formationCross-cut testCrystalCVDCVD coatDeep drawingDegreasingDegreasingDepolymerisationDesmearingDesmearing processDesorptionDie bondingDie bondingDielectric Barrier DischargeDiffusion layerDisinfectionDLCDopingDownstream plasmaDRIEDryDry etchingDry-etching processesDuplex coatingEasy-to-cleanElectrodeElectronElectron microscopeElectron voltElectronegative plasmaElectronic controlElectroplating of plasticsElectropositive plasmaElectrostatic chargeElongationEmbrittlementEPDMEPDM profilesEpilamisationEpitaxyEpoxy resinESCAEtchingEtching maskEtching printed circuit boardsEtching TeflonExcitationExhaust gasFaradayFatigue limitFibre compositeFilm treatmentFilmsFinishFlaking-offFlame sprayingFlame treatmentFlock-coatingFluorescent tubeFluorinatingFluorineFluteFlux agentsFully automated controlFunctionalisationGallium arsenideGasGas ballastGas dischargeGas supplyGDOSGeneratorGHz plasma systemGlassGlass bondingGlass etchingGlass fibresGlass transition temperatureGlowGlueGluingGraft polymerisationGrapheneGraphiteGround stateHard coatingsHF generatorsHigh voltageHigh voltage dischargeHigh voltage generatorHigh-grade finishingHigh-grade finishingHigh-purity surfaceHMDSOHydrocarbonHydrogenHydrogen plasmaHydrophilicHydrophobicICICPImproved adhesionImproved bondingImproving adhesionIncrease wettabilityInductionInductive plasmaIndustrial pretreatmentIonIon beam etchingIon densityIon etchingIon implantationIon platingIonic bondIonic current measuring sensorIonisationIronISMIsotopicIsotropicKHz plasma systemLab-on-Chip (LOC)Langmuir probeLead frameLIGALIGA processLight arcLightning dischargeLipophilicLipophobicLiquid-crystal polymersLithographyLow-pressure plasmaLow-pressure plasma technologyLow-temperature plasmaLow-temperature plasma systemLubricant varnishMagazineMagnetic mirrorsMagnetronMaskMaterial removalMean free pathMedical instrumentsMEMSMetallisingMetalsMFCMHz plasma systemsMicro-rougheningMicro-sandblastingMicrofluidicsMicroplasmaMicroscope slideMicrosystem technologyMicrotechnologyMicrowave couplingMicrowave plasmaMicrowave technologyMicrowell plateModificationModified surfaceModifying surfacesModifying the surface tensionMoleculeMonomerMouldingMu-metalMultilayerNanotechnologyNatural rubberNeedle valveNegative photoresistNeon tubeNeutronNoble gasNonstick coatNucleonsNucleusO-ringO-ring coatingOAUGDPOpen plasmaOptical coatingOveretchingOxidationOxygenPACVD (PECVD)PaintPaint adhesionPaintingPainting aluminiumPainting plastic surfacesPainting processesParallel plate reactorParticle acceleratorParylenePCBPerfluoralkoxy polymers (PFA)PermeationPhotolithographyPhotonPhotoresistPhotoresistPhotoresist ashingPhysical vapour deposition (PVD)Physical vapour deposition processPhysisorptionPicklingPirani sensorPlanar technologyPlasmaPlasma activationPlasma applicationsPlasma arc sprayingPlasma asherPlasma boridingPlasma carbonitridingPlasma carburisingPlasma chamberPlasma chemistryPlasma cleanerPlasma cleanerPlasma cleaningPlasma coatingPlasma densityPlasma diffusionPlasma effectsPlasma engineeringPlasma etcherPlasma etchingPlasma excitationPlasma generatorPlasma hardeningPlasma indicatorPlasma monitoringPlasma nitridingPlasma nitrocarburisingPlasma nozzlePlasma polymerisationPlasma processPlasma sandblastingPlasma spray coatingPlasma sprayingPlasma sterilisationPlasma stickPlasma stripperPlasma systemPlasma systemsPlasma technologyPlasma treatmentPlasmaBeamPlasticPlastic activationPlastic cleaningPlastic coatingPlastic paintingPlastic surfacesPlatingPolarityPolyacrylonitrilePolyamidePolybutenePolybutylene terephthalate (PBT)PolycarbonatePolydimethylsiloxane (PDMS)PolyethylenePolyethylene terephthalate (PET)PolyimidePolymerPolymerisationPolymethacrylimide (PMI)Polymethyl methacrylate (PMMA)PolyolefinesPolyoxymethylene (POM)Polyphenylene sulfide (PPS)PolypropylenePolystyrene (PS)Polytetrafluorethylene (PTFE)Polyvinyl acetate (PVA)Polyvinyl chloride (PVC)Polyvinyl fluoride (PVF)Polyvinylidene fluoride (PVDF)Positive columnPositive resistPowder-coatingPrecursorPretreatmentPrimerPrinted circuit boardPrinted circuit boardPrinted circuit board etchingPrintingPrinting processesProcess gasProcess timeProtective coatProtonPTFEPTFE coatingPTFE etchingPUR hardPUR softPWISPWISPWIS testPWIS-freeRadical sitesRadicalsReactive ion etching (RIE)Reactive ion platingRecombinationReducing the wettabilityRelease agent residuesRelease agentsRemoving siliconeRoll-to-rollRoots pumpRoots pumpRotary drumRotary vane pumpRub fastnessRubberSaturationScanning electron microscope (SEM)sccmScratch resistanceScreen printingSealSelf-biasSelf-hardening resinsSemi-automaticSemiconductor block technologySemiconductorsSensitivitySilaneSilica glassSilica glass boatSiliconSilicon carbideSilicon dioxideSilicon nitrideSilicon waferSiliconeSiliconeSilicone removersSilverSIMSSliding propertiesslmSmall flangeSMDSoilingSolderingSolenoid valveSpecimen holderSputter etcherSputter systemSputteringStainless steelSteelSterilisationSulphur hexafluorideSupply unitSurface cleaningSurface coatingSurface energySurface finishingSurface finishing for plasticsSurface oxideSurface rougheningSurface technologySurface tensionSurface treatmentSurfactantsSurgerySynthesisSynthetic fibreSystem componentsTargetTeflonTensile testTeslaTest inkTetrafluormethaneTextile treatmentThermoplastic elastomer polyamide (TPA)Thermoplastic elastomers (TPE)Thick film technologyThin film technologyThornton diagramTitanium carbideTitanium nitrideTMMFTOF-SIMSTransmission electron microscopy (TEM)Treatment in a rotary drumTrenchTurbomolecular pumpUltra High Purity (UHP)Ultra-fine cleaningUltra-fine plasma cleaningUltra-high vacuumUltra-high vacuum pumpUltra-hydrophobicUndercuttingUV radiationVacuumVacuum chamberVacuum chamberVacuum plasma sprayingVacuum pumpValenceValence electronsVan-der-Waals forcesVapour depositionWafer etcherWafersWater-based paintWaterproofingWearWet processesWettabilityWettingWetting angle adjustmentWetting testYarn treatment[Translate to english:] Microwells

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PACVD (PECVD)PaintPaint adhesionPaintingPainting aluminiumPainting plastic surfacesPainting processesParallel plate reactorParticle acceleratorParylenePCBPerfluoralkoxy polymers (PFA)PermeationPhotolithographyPhotonPhotoresistPhotoresistPhotoresist ashingPhysical vapour deposition (PVD)Physical vapour deposition processPhysisorptionPicklingPirani sensorPlanar technologyPlasmaPlasma activationPlasma applicationsPlasma arc sprayingPlasma asherPlasma boridingPlasma carbonitridingPlasma carburisingPlasma chamberPlasma chemistryPlasma cleanerPlasma cleanerPlasma cleaningPlasma coatingPlasma densityPlasma diffusionPlasma effectsPlasma engineeringPlasma etcherPlasma etchingPlasma excitationPlasma generatorPlasma hardeningPlasma indicatorPlasma monitoringPlasma nitridingPlasma nitrocarburisingPlasma nozzlePlasma polymerisationPlasma processPlasma sandblastingPlasma spray coatingPlasma sprayingPlasma sterilisationPlasma stickPlasma stripperPlasma systemPlasma systemsPlasma technologyPlasma treatmentPlasmaBeamPlasticPlastic activationPlastic cleaningPlastic coatingPlastic paintingPlastic surfacesPlatingPolarityPolyacrylonitrilePolyamidePolybutenePolybutylene terephthalate (PBT)PolycarbonatePolydimethylsiloxane (PDMS)PolyethylenePolyethylene terephthalate (PET)PolyimidePolymerPolymerisationPolymethacrylimide (PMI)Polymethyl methacrylate (PMMA)PolyolefinesPolyoxymethylene (POM)Polyphenylene sulfide (PPS)PolypropylenePolystyrene (PS)Polytetrafluorethylene (PTFE)Polyvinyl acetate (PVA)Polyvinyl chloride (PVC)Polyvinyl fluoride (PVF)Polyvinylidene fluoride (PVDF)Positive columnPositive resistPowder-coatingPrecursorPretreatmentPrimerPrinted circuit boardPrinted circuit boardPrinted circuit board etchingPrintingPrinting processesProcess gasProcess timeProtective coatProtonPTFEPTFE coatingPTFE etchingPUR hardPUR softPWISPWISPWIS testPWIS-free

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