Glossary of surface technology

Pirani sensor

Pressure sensor whose measuring principle is based on the change of the thermal conductivity of the gas in dependence on the gas pressure. Also referred to as thermal conductivity vacuum gauge. The working range is between 10 and 10-3 mbar. Frequently used in plasma systems.

+49 7458 99931-0

Get an expert on the phone

Write us what we can do for you

Request a quotation

You know exactly what you’re looking for