Glossary of surface technology

Wafer etcher

Etching of silicon wafers is a primary application of low-pressure plasma technology. Wafers can be etched in batches (stacks). For this application, Diener electronic offers a specific silica glass boat for holding the stack. Plasma systems optimised for etching silicon wafers are referred to as “wafer etchers”. In particular, a wafer etcher is equipped with a barrel reactor and usually a microwave coupling..

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