Cleaning sources
PLASMA CLEANING SOURCES BY DIENER ELECTRONIC
The plasma cleaning source is an optional exhaust cleaning device for dry-running vacuum pumps, Roots and screw pumps. Matching dry-running vacuum pumps such as Roots or screw pumps are available for the different plasma systems to carry out the respective plasma process.
In practice, these pumps frequently become contaminated by fluid residues during a plasma application, limiting the functionality of the vacuum pump.
Developed, manufactured and registered for patent approval by Diener electronic, the plasma cleaning source is a protection for these vacuum pumps and cleans the cavities.
