Cleaning sources


The plasma cleaning source is an optional exhaust cleaning device for dry-running vacuum pumps, Roots and screw pumps. Matching dry-running vacuum pumps such as Roots or screw pumps are available for the different plasma systems to carry out the respective plasma process.

In practice, these pumps frequently become contaminated by fluid residues during a plasma application, limiting the functionality of the vacuum pump.

Developed, manufactured and registered for patent approval by Diener electronic, the plasma cleaning source is a protection for these vacuum pumps and cleans the cavities.

The plasma cleaning source essentially consists of a process gas inlet and outlet to the cavity and an electrode arranged in or on the cavity for plasma generation. Deposits in the cavity can be removed or avoided at any time. This ensures a longer useful life of the vacuum pump.


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