Glossary of surface technology
Precursor
Starting substance for a chemical reaction. In plasma technology, a gas or a liquid substance which passes to the gas phase in the bottle evaporator. In the plasma chamber, it forms a process gas which can be excited or ionised by the plasma or broken off into radicals, making it highly reactive. In this way, the precursor becomes active as an etching gas or starting substance for plasma polymerisation. aktiv.