Glossary of surface technology

Process gas

The process gas is the gas or gas mixture used to excite theplasma. In dependence on the properties of the process gas, a wide range of plasma effects can be achieved. Accordingly, a variety of process gases are used. The most important process gases are: oxygenhydrogentetrafluormethaneargon, helium, sulphur hexafluoride, air, water, ....

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