Glossary of surface technology


Process in which an atom loses an electron and thus becomes a positively charged ion. 
In plasma generation, the electrons of an atom are excited so heavily that they leave the atomic shell. This excitation can be effected by great heat, high electric fields (gas discharge) or heavy oscillations in electromagnetic field (high-frequency excitation).
An atom can also catch free electrons and thus become a negatively charged ion. werden.

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