Glossary of surface technology


Anisotropic means having different properties in different directions. Opposite: isotropic (having uniform properties in all directions).
A material is anisotropic when it has different properties in different directions, for example stiffness or conductivity.

The plasma effect can be set to be isotropic or anisotropic. Particularly when etching microstructures, anisotropic effects are desired, i.e. a strong preferred direction of the etching speed.The anisotropic effect is present primarily in physical etching processes (ion etching, RIE = Reactive Ion Etching).

When etching structures with etch masks, the aim is to achieve an anisotropic etching effect.

  • icon Component


  • icon Material removal

    Material removal

  • Icon Substrate atom

    Substrate atom

  • Icon Ions


  • Icon free radicals

    free radicals

  • Icon Etching product (volatile)

    Etching product (volatile)

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