Glossary of surface technology

ESCA

Acronym for "Electron Spectroscopy for Chemical Analysis", a technology also referred to as IEE (Induced Electron Emission) or XP(E)S (X-Ray induced Photoelectron Spectroscopy) for the analysis of bonding states. The determination of oxidation states, where all elements except hydrogen and helium become analysable, is the example of the ESCA application for the analysis of sample surfaces. 

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