Glossary of surface technology

Plasma etcher

Generally, low-pressure plasma systems are fit for use in different plasma processes. A plasma system can be optimised for use in plasma etching. Preferably, the system should be equipped with the optional microwave coupling because microwave excitation provides for particularly high etching rates and a highly selective etching process. Accordingly, a plasma system optimised for this application is often referred to as ‘plasma etcher’.

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