Generators

for plasma systems

A generator is indispensable for the functionality of a plasma system. There is no general answer to the question which frequency is the best for the intended plasma application; this must be determined individually in each case. In addition to the plasma generators with a frequency of 40 kHz and 2.45 GHz comprised in the Diener electronic product portfolio for years, the 13.56 MHz generators with 100 and 300 watts developed and manufactured in-house will be launched. 

The main areas of application for both power ranges are the plasma applications activation, cleaning, etching, semiconductor (front-end), semiconductor (back-end), and plasma polymerisation. Impedance matching can either be done manually (hand-matching) or automatically (auto-matching); this is necessary in any case. Accordingly,  the HF system comprises a generator and matching.

While in manual matching the matching must be set at each process start and checked and readjusted every now and then during the process, the capacitors are set automatically and readjusted if changes occur.

Other options include display of forward and reverse power, safety cut-off via door switch and vacuum safety switch, quartz-stabilised frequency to comply with DIN EN 55011, and a PC interface. 

2.45 GHz generator (microwave)

Output range 0 to 850 watts. The generator has a PC interface. The main areas of application are activation, cleaning, etching, semiconductor (front-end), semiconductor (back-end), and plasma polymerisation.

The microwave generator is also available with  1200 watts.

 

Technical data: 

Max. output power    1.200 W
Max. output current    300 mA
Max. output voltage    5.000 V
Max. input power    < 1.300 W
Max. current input    9 r.m.s. current 
(no PFC)
Mains voltage    210...250 VAC
Efficiency    > 95 % (with nominal output)
Power control    Current: 0...300 mA
Output: 0...1,200 W
Burst: 100µ...100ms (pulse / pause time)
Control deviation    ± 5 % (of maximum value, with temperature compensation)
cooling    Air, max. 70 l/min, temperature-controlled
Ambient temperature    +15...+40 °C
Load error tripping time    Short circuit/no-load < 1 sec, control error < 5 sec
Dimensions    < 485 x 145 x 290 mm³ (wxhxd)
Weight    approx. 6.0 kg
 

Generator 13.56 MHz, 100 W 

RF generators – Areas of application: 

  • Low-pressure plasma
  • RF heater

RF generator 13.56 MHz, 100 W 

  • RF nominal output power: 100 watts
  • Frequency: 13.560 MHz ± 100 ppm
  • Adjustable RF output power: 0 - 100 watts, continuous
  • Generator can be pulsed: Min. on-time: 5µs
  • Impedance: 50 ohms
  • RF stability: < 5% (depending on the applied matching device)
  • Mismatch protection installed (from open circuit to short circuit)
  • Maximum mismatch without power reduction: VSWR = 1.2
  • RF can be switched on with full load
  • Connection to power supply: 88 - 264 V WS / 47 - 63 Hz (in connection with external power supply)
  • Power consumption: max. 220 watts
  • Remote control connection for: - RF On/Off-RF power setting (0...10 V = 0 ... 100 %)
  • RF output: N socket
  • Mains connection: external power supply module
  • Weight: approx. 6.5 kg (generator) plus 1.0 kg (power pack)

Please contact us for technical advice on this system.

Generator 13.56 MHz, 300 W 

RF generators – Areas of application: 

  • Low-pressure plasma
  • RF heater

RF generator 13.56 MHz, 300 W 

  • RF nominal output power: 300 watts
  • Frequency: 13.560 MHz ± 100 ppm
  • Adjustable RF output power: 0 - 300 watts, continuous
  • Generator can be pulsed: Min. on-time: 5µs
  • Impedance: 50 ohms
  • RF stability: < 5% (depending on the applied matching device)
  • Mismatch protection installed (from open circuit to short circuit)
  • Maximum mismatch without power reduction: VSWR = 1.2
  • RF can be switched on with full load
  • Connection to power supply: 88 - 264 V WS / 47 - 63 Hz 
  • Power consumption: max. 580 watts
  • Remote control connection for: - RF On/Off-RF power setting (0...10 V = 0 ... 100 %), automatic matching device, PC or plasma system control
  • RF output: N socket
  • Connection to power supply: IEC panel plug with filter
  • Weight: approx. 18 kg 

Please contact us for technical advice on this system.

LFG generator, 500W

Max. output volume: 500W
Max. output current: 1.3A
Max. output voltage: 1200VAC
Max. power consumption: 560W
Input voltage: 210...230VAC 50/60Hz
Input current: max 2.6 r.m.s. current
Efficiency: > 90 % (with nominal output)
Power adjustment mode: Current mode: 0.1A - 1.3A Power mode: 10W - 500W (via DSUB or PC connection) Pulse mode:
•    Pulse width: 100µs - 100ms
•    Pulse delay: 100µs - 100ms

Accuracy: > ±5 % of the limit value
Mismatch protection from no-load and short circuit
•    Switchoff time with no-load/short circuit
: < 1 sec
•    Switchoff time with matching fault
: < 5 sec
Synchronised parallel operation
Temperature range (in operation): +15 - +40 °C
cooling: max. 70 m³/h air flow connections:
•    DSUB25 (female) for remote control via industrial systems (24/10V voltage level)
Weight: 5.6 kg
Applications:
•    Low-pressure plasma generators

LFG generator, 1000W

Max. output volume: 1200W    
Max. output current: 4A    
Max. output voltage: 1200VAC    
Max. power consumption: 1500W    
Input voltage: 210...230VAC 50/60Hz    
Input current: max 3x 5 r.m.s. current    
Efficiency: > 90 % (with nominal output)    
Power adjustment mode: Current mode: 1A - 4A Power mode: 300W - 3000W (via DSUB or PC connection) Pulse mode:
•    Pulse width: 100µs - 100ms
•    Pulse delay: 100µs - 100ms    
Accuracy: > ±5 % of the limit value    
Mismatch protection from no-load and short circuit
•    Switchoff time with no-load/short circuit
: < 1 sec
•    Switchoff time with matching fault
: < 5 sec    
Synchronised parallel operation    
Temperature range (in operation): +15 - +40 °C    
cooling: max. 70 m³/h air flow     

Connectors:
•    DSUB25 (female) for remote control via industrial systems (24/10V voltage level)    
Weight: 18 kg    
Applications:
•    Low-pressure plasma generators    

LFG generator, 3000W

Max. output volume: 3000W    
Max. output current: 10A    
Max. output voltage: 1200VAC    
Max. power consumption: 3600W    
Input voltage: 210...230VAC 50/60Hz    
Input current: max 3x 7 r.m.s. current    
Efficiency: > 90 % (with nominal output)    
Power adjustment mode: Current mode: 1A - 4A Power mode: 300W - 3000W (via DSUB or PC connection) Pulse mode:
•    Pulse width: 100µs - 100ms
•    Pulse delay: 100µs - 100ms    
Accuracy: > ±5 % of the limit value    
Mismatch protection from no-load and short circuit
•    Switchoff time with no-load/short circuit
: < 1 sec
•    Switchoff time with matching fault
: < 5 sec    
Synchronised parallel operation    
Temperature range (in operation): +15 - +40 °C    
cooling: max. 70 m³/h air flow     

Connectors:
•    DSUB25 (female) for remote control via industrial systems (24/10V voltage level)    
Weight: 18 kg    
Applications:
•    Low-pressure plasma generators

LFG generator, 5000W

Max. output volume: 5000W
Max. output current: 10A
Max. output voltage: 1200VAC
Max. power consumption: 5700A
Mains connection: 210...230VAC 50/60Hz
Input current: max 3 x 7 r.m.s. current
Efficiency: > 90 % (at nominal power)
Power setting: Current mode: 1A – 4A Power mode: 300W – 3000W
(via DSUB or PC connection) Burst mode:
•    Pulse-width: 100µs - 100ms
•    Pulse-delay: 100µs - 100ms
Accuracy: < ±5 % of the limit value
Load mismatch for “open output” and “short-circuit”
•    Switchoff time with open load: <1sec.
•    Switchoff time with setting error: < 5 sec
Synchronous parallel operation
Operating temperature range: +15 - +40 °C
Cooling: max. 323 m³/h air throughput (temperature-controlled)
Interfaces:
•    DSUB25 (female) for remote control via industrial control panels (24/10V voltage level)
Weight: 18 kg
Application:
•    Low-pressure plasma generator

Other accessories for generators:

Bias voltage measurement

The bias voltage measuring instrument is available for kHz and MHz generators.

Microwave leak tester

For microwave systems, it may be advisable to provide a microwave leak tester as a protection from hazardous radiation.

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