The Tetra 45 plasma systems can be combined in different variants in a modular manner. Below, please find an overview over the most common options using the Tetra 45 plasma systems.
The chamber with 125 mm height and 572 mm width is particularly suitable for large-sized components. Since the chamber is made from aluminium extruded sections, the length can be flexibly adjusted.
- Analytics (SEM, TEM)
- Archaeology
- Automotive
- Life sciences
- Elastomer technology
- Electrical engineering
- Electron microscopy
- Precision engineering
- Research and development
- Semiconductor technology
- Small batch production
- Plastics Technology
- Medical engineering
- Micro-system technology
- Solar cell technology
- Textile technology
Basic equipment
- Housing sizes vary depending on components/options
- Chamber volume: Varies depending on chamber length
- Voltage supply: 230 V or 400 V / 3 phases
Vacuum chambers
- Stainless steel rectangular, hinged door (approx. W 572 mm, H 125 mm, depth variable)
Generators
Frequencies:
- 80 kHz: power 1000 W or 3000 W
- 13.56 MHz: power 0 - 300 W; 0 - 600 W
- 2.45 GHz: power 0 - 600 W; 0 - 1200 W
All generators are infinitely adjustable from 0 - 100%
Vacuum pumps
- In different sizes and from different manufacturers (if required with activated carbon filter)
Additional options
Spare parts kit, pressure gauge, corrosive gas design, gas bottles, pressure reducer, heater plate, temperature display, heatable chamber, Faraday box, plasma polymerisation accessories, test inks, oxygen generator, slow ventilation, slow pump-off, maintenance/service, documentation in local language, installation on site incl. training. Further options available on request