Tetra 45

LOW-PRESSURE PLASMA SYSTEMS (PLASMACLEANER)

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The Tetra 45 plasma systems can be combined in different variants in a modular manner. Below, please find an overview over the most common options using the Tetra 45 plasma systems.

The chamber with 125 mm height and 572 mm width is particularly suitable for large-sized components. Since the chamber is made from aluminium extruded sections, the length can be flexibly adjusted.

 

  • Analytics (SEM, TEM)
  • Archaeology
  • Automotive
  • Life sciences
  • Elastomer technology
  • Electrical engineering
  • Electron microscopy
  • Precision engineering
  • Research and development
  • Semiconductor technology
  • Small batch production
  • Plastics Technology
  • Medical engineering
  • Micro-system technology
  • Solar cell technology
  • Textile technology

Different models

Model 1

Model 1, standard system
rotary switch control in basic unit type A
Vacuum chamber rectangular, aluminium, hinged door
(W: 572 mm x D 650 mm x H 125 mm)
Gas supply:
Needle valve

Model 2

Model 2, standard system
BASIC PC control in basic unit type A
Vacuum chamber rectangular, aluminium, hinged door
(W: 572 mm x D 650 mm x H 125 mm)
Gas supply:
MFC

Model 3

Model 3, standard system
FULL PC control (Windows 10 IoT) in basic unit type A
(W 850 mm x D 800 mm x H 1,700 mm)
Vacuum chamber rectangular, aluminium, hinged door
(W: 572 mm x D 650 mm x H 125 mm)
Gas supply:
MFC

Model 4

Model 4, corrosive gas system (e.g. for fluorinated process gases)
rotary switch control in basic unit type A
(W 850 mm x D 800 mm x H 1,700 mm)
Vacuum chamber rectangular, aluminium, hinged door
(W: 572 mm x D 650 mm x H 125 mm)
Gas supply:
Needle valve

Model 5

Model 5, corrosive gas system (e.g. for fluorinated process gases)
BASIC PC control in basic unit type A
(W 850 mm x D 800 mm x H 1,700 mm)
Vacuum chamber rectangular, aluminium, hinged door
(W: 572 mm x D 650 mm x H 125 mm)
Gas supply:
MFC

Model 6

Model 6, corrosive gas system (e.g. for fluorinated process gases)
FULL PC control (Windows 10 IoT) in basic unit type A
(W 850 mm x D 800 mm x H 1,700 mm)
Vacuum chamber rectangular, aluminium, hinged door
(W: 572 mm x D 650 mm x H 125 mm)
Gas supply:
MFC

Technical data

Basic equipment

  • Housing sizes vary depending on components/options
  • Chamber volume: Varies depending on chamber length
  • Voltage supply: 230 V or 400 V / 3 phases

Gas supply

  • Mass flow controllers (MFCs)

Vacuum chambers

  • Stainless steel rectangular, hinged door (approx. W 572 mm, H 125 mm, depth variable)

Charge

  • Product carriers (optionally: water-cooled), aluminium plate, stainless steel plate

Controls

  •     PCCE control (Microsoft Windows CE)
  •     PC control (Microsoft Windows 10 IoT)

Pressure measurement

  •     Pirani
  •     Capacity pressure gauge (for corrosive gas version)

Timer

  • Digital

Generators

Frequencies:

  • 80 kHz: power 1000 W or 3000 W
  • 13.56 MHz: power 0 - 300 W; 0 - 600 W
  • 2.45 GHz: power 0 - 600 W; 0 - 1200 W

 

 

All generators are infinitely adjustable from 0 - 100%

Vacuum pumps

  • In different sizes and from different manufacturers (if required with activated carbon filter)

Additional options

Spare parts kit, pressure gauge, corrosive gas design, gas bottles, pressure reducer, heater plate, temperature display, heatable chamber, Faraday box, plasma polymerisation accessories, test inks, oxygen generator, slow ventilation, slow pump-off, maintenance/service, documentation in local language, installation on site incl. training. Further options available on request

+49 7458 99931-0

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