Glossary of surface technology

Rotary vane pump

The most frequently used pump type in vacuum technology and also in plasma technology is the mechanical oil-lubricated rotary vane pump. It can be used to realise pressures from atmospheric pressure to 10-3mbar. To generate an ultra-high vacuum, a rotary vane pump is used most frequently to generate the pre-vacuum.

You can find more knowledge about the different types of pumps and an excerpt from the pump range here.

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