Glossary of surface technology

Rotary vane pump

The most frequently used pump type in vacuum technology and also in plasma technology is the mechanical oil-lubricated rotary vane pump. It can be used to realise pressures from atmospheric pressure to 10-3mbar. To generate an ultra-high vacuum, a rotary vane pump is used most frequently to generate the pre-vacuum.

You can find more knowledge about the different types of pumps and an excerpt from the pump range here.

+49 7458 99931-0

Get an expert on the phone

Write us what we can do for you

Request a quotation

You know exactly what you’re looking for