Silicon nitride
3N4, an amorphous, hard and chemically resistant material, used as a diffusion barrier against water and alkali ions. Generated in the PACVD process from SiH4 and NH3; very important for semiconductor technology.
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3N4, an amorphous, hard and chemically resistant material, used as a diffusion barrier against water and alkali ions. Generated in the PACVD process from SiH4 and NH3; very important for semiconductor technology.
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