Glossary of surface technology

Silicon nitride

3N4, an amorphous, hard and chemically resistant material, used as a diffusion barrier against water and alkali ions. Generated in the PACVD process from SiH4 and NH3; very important for semiconductor technology.

+49 7458 99931-0

Get an expert on the phone

Write us what we can do for you

Request a quotation

You know exactly what you’re looking for