Aspect ratio

Aspect ratio is the height and width ratio of microstructures. By means of anisotropic plasma etching processes (⇒ Ion etching IE and ⇒ reactive ion etching (RIE), large aspect ratios between trench depth and width or web height and width of 10 or more can be achieved. Extremely large aspect ratios of 50 and more with structure widths of 0.2 µm and up are realised by means of the LIGA process. erzielen.