Parylene P6



Parylene is the short designation of the polymer group of poly(para-xylylenes). The polymers consist of different substituted para-xylylenes. The original basis for coating are dimers. This is a molecular compound consisting of two identical sub-units, the so-called monomers.

Properties and benefits:

Parylene coatings offer a large number of benefits. Parylenes...

  • are completely conformal, i.e. they adapt even to complex substrate contours such as sharp edges, bore holes or blind holes
  • are pinhole-free already from coat thicknesses of approx. 0.5 µm
  • are chemically insoluble and resistant against a large number of chemicals
  • have very good barrier properties against moisture and chemicals
  • have a high dielectric strength
  • have dry lubricating properties (low coefficient of friction)
  • are hydrophobic: wetting angle for H2O between 92° and 98°
  • are transparent between 90 and 96 % in the visible wavelength range (depending on type)
  • are biocompatible: parylenes of the types C and N can be separated which can be certified to USP Class VI, ISO 10993 and FDA.

Technical data

Coating substance

  • Parylene N, C, D, F-VT4

Possible coat thicknesses

  • 0.05 to 20 micrometers


  • Width: approx. 700 mm
  • Depth: approx. 500 mm
  • Height: approx. 700 mm


  • 1.6 kW / max 750 °C


  • Diameter: 200 mm
  • Height: 200 mm


  • Diameter: 170 mm
  • Height: 170 mm

Cryo trap

  • Liquid nitrogen

Pump system

  • Two-stage rotary slide vane pump

Exhaust air

  • 20 mm tube 

Final pressure

  • 1 x 10-3 mbar


  • PC-based control with Windows operating system 


  • 230 V/16 A /50-60 Hz (compressed air: 6 bar dry and oil-free)


  • 16 m3/h

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