Low-Pressure PlasmaPlasma system Femto
Flexible plasma system thanks to a modular design
With its compact chamber volume of 2 - 4 litres and the option of customised configuration in either a tabletop or floor-standing housing, the system is ideally suited to research, development and demanding laboratory applications.
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Modular plasma system for individual process requirements
The Femto plasma system can be combined and configured using its individual components, much like a modular system. The modular system starts with the smallest chamber volume, that of the Femto, and extends all the way to the Tetra 1440 and beyond, with no limits in the field of custom-built systems. Thanks to the modular design, the system can be individually configured as a benchtop or floor-standing unit and optimally adapted to your process requirements.
A range of control options ensures user-friendly operation and reproducible processes – from standardised applications right through to complex, documented plasma sequences.
The Femto is suitable for ultra-finecleaning, surface activation, plasma etching and plasma coating of a wide variety of materials. Thanks to its high adaptability, the system is used in laboratories as well as in development departments and production-related applications.
As an entry-level option within the modular system concept, the Femto forms the basis for future expansions, right up to large-volume customised systems. This enables companies to invest in a future-proof solution that can be flexibly adapted to growing requirements.
Cleaning
The Low-Pressure Plasma system Femto offers solutions for ultra-precise cleaning of all surfaces, for every substrate, and for every post-treatment process. Plasma cleaning removes all organic residues without subjecting the component to chemical or thermal stress.
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Activation
Good surface wettability is a prerequisite for the adhesion of bonding partners during painting, gluing, printing, or bonding. Plasma activation using the Low-Pressure Plasma Femto system creates polar bonding partners and increases the surface energy.
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Coating
The Low-Pressure Plasma Femto system can also modify surfaces by applying a coating. Plasma coating can be used to deposit hydrophobic, hydrophilic, protective, or insulating layers of any kind.
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Etching
The plasma technology of the Low-Pressure Plasma Femto system enables anisotropic and isotropic etching. This results in the nanostructuring of surfaces, which increases their surface area and improves adhesion.
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2 - 4l chamber
The Femto plasma system has a chamber volume of 2 - 4, which is ideally suited to simple components used in industry and research. For research and laboratory work, a chamber made of borosilicate or quartz glass is available. These offer impressive chemical resistance, ensuring a high level of process purity. For certain applications, a rotating flask is also available to ensure uniform treatment. This makes the Femto plasma system ideally suited to applications in medical technology or laboratory work. For industrial use, stainless steel or aluminium chambers are available, which ensure particularly safe and stable industrial processes.
RIE system
If required, the Femto offers the option of an RIE system specialising in reactive ion etching. The design of this plasma system not only combines the two etching methods – isotropic and anisotropic etching – but also incorporates them into a state-of-the-art design. A chamber with a Plexiglas door provides a view into an automated chamber that can be lowered down to the component for plasma treatment and raised back up again. The glass door, fitted with sensors, prevents premature opening and thus accidental interference with the process. The Femto plasma system thus ensures the highest levels of process reliability and process control.
Modular system
Drawing on years of experience and proven concepts, Diener electronic has developed a unique modular system that allows the systems to be configured flexibly. To facilitate easy integration into an existing production environment, the Femto plasma system can be housed in a compact benchtop unit or a sturdy floor-standing unit. The appropriate housing and control unit are selected based on the chamber size. The result is a bespoke production system for industries with demanding applications.
Control
For the compact tabletop design, the LowCost, Basic PC and the user-friendly semi-automatic control system are available. With the semi-automatic control system, the process parameters can be set manually, meaning that no prior knowledge is required to operate the system. For industrial applications, a robust floor-standing housing with a simpler Low Cost or Basic PC control system featuring pre-set processes is well suited. For demanding production environments, a Full PC control system is available. This provides process archiving, alarm lists and network connectivity. Process transparency and traceability form the basis for efficient and cost-effective production.
Technical data
Housing dimensions
Tabletop
Standalone
Control unit
Semi-automatic
Low Cost PC (Windows CE)
Basic PC (Windows CE)
Full PC (Windows 11 IoT Enterprise)
Vacuum chamber
Stainless steel, Hinged door
⌀ 100 mm x
D 277 mm; Volume approx. 2 liters
Stainless steel, Hinged door
W 103 mm x H 103 mm x D 285 mm; Volume approx. 3 liters
Aluminium, Hinged door
W 110 mm x H 120 mm x D 300 mm; Volume approx. 4 liters
Optional: Depth variably expandable up to max. 3000 mm
Quartz glass, Hinged door
⌀ 95 mm x
D 280 mm; Volume approx. 2 liters
Borosilicate glass, Hinged door
⌀ 95 mm x
D 279 mm; Volume approx. 2 liters
Generator
40.00 kHz | Power output 0 - 100 W
100.00 kHz | Power output 0 - 500 W
13.56 MHz | Power output 0 - 100 W
13.56 MHz | Power output 0 - 200 W
2.45 GHz | Power output 0 - 300 W
Gas supply
Needle valve
MFC (Mass flow controller)
Electrode
For customer’s request
Pressure measurement
Pirani sensor
Capacity pressure gauge
Power supply
230 V | 16 A
400 V | 16 - 125 A
Technical changes reserved.
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FAQ Frequently Asked Questions
What can be covered using the Femto?
The Femto from Diener electronic can be used to process all vacuum-resistant materials.
Which gases can be used with the Femto?
The following gases can be used in the Femto and, more generally, in low-pressure plasma: O₂, N₂, Ar, ambient air, CO₂, H₂O vapour and forming gas
Can temperature-sensitive components be processed using the Femto?
Yes, as this is a cold plasma, the low-pressure plasma systems Femto from Diener electronic are suitable for temperature-sensitive components.
Can the Femto system handle magnetic components?
Magnetic components can also be processed effectively in the vacuum chamber of the Femto from Diener electronic.
Can ESD-sensitive components be handled using the Femto?
Yes, this is possible using low-pressure plasma of the Femto. A trial can be carried out in our process department on request.
What is the typical pressure range usually found in the vacuum chamber of the Femto?
The typical pressure range of the Femto is adjustable from 0.1 to 1.0 mbar, depending on the defined low-pressure plasma process.
What is the typical process temperature for the Femto in the vacuum chamber?
With the Femto from Diener electronic, the temperature is normally between room temperature and approximately 80 °C – depending on the component, chamber type, process time and load quantity. Higher temperatures can be achieved on request from Diener electronic using heating elements.
Is there an alternative to hydrogen in the Femto system?
Upon request to Diener electronic, a hydrogen generator or water vapour may be considered as an alternative to hydrogen for the Femto system.
What connectivity options are available for the software control system on the Femto system?
With its full PC control system, the Femto plasma system from Diener electronic offers the following connection options, such as:
- higher-level control systems, e.g. via Profinet
- MES systems, e.g. via OPC UA
- Database connection via ODBC
Can the control software for the Femto plasma system be adapted to meet our requirements?
On request, we at Diener electronic can customise the full PC control system for the Femto series. Please do get in touch with us regarding this.
What software integration options are available for the Femto?
With the Low Cost control unit for Femto, it is not possible to connect it.
Can you see through the sight glass?
Yes, depending on the material, it is possible to see inside the vacuum chamber.
Are exhaust air filters necessary?
Yes, all systems must be connected to a proper exhaust system, regardless of the type of gas used! Nitrogen oxides, exhaust gases, fine oil mist (from oil pumps), etc. are produced, which must not be inhaled; furthermore, the gases are often acidic, meaning they promote the rusting of surrounding parts, machinery and equipment.
What is the frequency of the GHz system Femto?
The generators for the GHz system Femto operate at an ISM frequency of 2.45 MHz – comparable in intensity to that of a microwave. Please enquire about the safety guidelines for people with pacemakers.
Can the chamber door be opened whilst the machine is running?
Under normal circumstances, no – the negative pressure created by the vacuum pulls the door against the chamber housing.
Can the components be touched after treatment?
Yes, it is safe – we recommend handling it with care and wearing gloves to prevent contamination. This is because plasma removes organic, but not inorganic, contaminants. For example, the sweat from fingerprints contains salts (inorganic contaminants).
Can metal chips or dust be removed from components?
Unfortunately, it is not possible to clean metal shavings or dust from the surfaces.
What types of impurities can be removed?
All organic, film-like contaminants up to a size of approximately 1 micrometre can be removed using Diener electronic’s plasma systems.
How long can activated parts be stored before further processing?
The curing time of the components depends on the activation time and the material, and varies from a few minutes to several months. It is therefore often necessary to carry out tests on site.
Metals, ceramics, glass and elastomers: a few hours
; plastics (excluding elastomers): several days, weeks or months
Which surfaces can be activated using the Femto plasma system?
The Femto plasma system from Diener electronic can be used to activate the following surfaces: plastics, metals, glass, ceramics and textiles.
