Femto

LOW-PRESSURE PLASMA SYSTEMS (PLASMACLEANER)

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The Femto plasma systems can be combined in different variants in a modular manner. Below, please find an overview over the most common options using the Femto plasma systems. Femto plasma systems are primarily used in the following sectors:

Analytics, archaeology, automotive, research and development departments, semiconductor technology, small-series manufacture, plastics technology, medical engineering, micro-system engineering, sensory technology, sterilising, textile technology

Model 1A base unit type A incl. semi-automatic control

Vacuum chamber type A (round, stainless steel, cover, diam.: 100 mm, D: 278 mm)
Gas supply
Needle valve

Model 1 base unit type B incl. manual control

Vacuum chamber type A (round, stainless steel, cover, diam.: 100 mm, D: 278 mm)
Gas supply
Needle valve

Modell 1 B2 Grundgerät Typ B inkl. halbautomatische Steuerung

Vakuumkammer / Rezipient Typ G        
(rechteckig, Aluminium, Tür mit Scharnier,
B: 110 mm, H: 120 mm, T: 300 mm)
Gaszufuhr
Nadelventil

Model 1C base unit type C incl. semi-automatic control

Vacuum chamber type G (rectangular, aluminium, hinged door,
W: 110 mm, H: 120 mm, D: 300 mm)
Gas supply
Needle valve

Model 3 base unit type B incl. Basic Pc control (Windows CE)

Vacuum chamber type G
(rectangular, aluminium, hinged door,
W: 110 mm, H: 120 mm, D: 300 mm)
Gas supply
MFC

Model 4 base unit type B incl. full PC control (Windows 10 IoT)

Vacuum chamber type G (rectangular, aluminium, hinged door,
W: 110 mm, H: 120 mm, D: 300 mm)
Gas supply
MFC

Model 4 B1 base unit type B incl. full PC control (Windows 10 IoT)

Vacuum chamber type A
(round, stainless steel, cover, diam.: 100 mm, D: 278 mm)
Gas supply
MFC

Technical data

Basic equipment

  • The housings vary depending on the components / options
  • Chamber volume: depending on the version, 1.9 to 6 litres
  • Voltage supply: 230 V for table units, 400 V / 3 phases for stand-alone units

Vacuum chambers

  • Stainless steel round with cover (approx. ∅ 100 mm, L 278 mm or L 600 mm)
  • Stainless steel rectangular, hinged door (approx. W 103 x D 285 x H 103)
  • Aluminium rectangular, hinged door (approx. ∅ 103 mm x 103 mm, L 280 mm or L 600 mm)
  • Quartz glass (UHP) round with lid or with hinged door (approx. ∅ 95 mm, L 280 mm or L 600 mm)
  • Borosilicate glass (UHP) round with lid or with hinged door (approx. ∅ 95 mm, L 280 mm or L 600 mm)

Charge

  • Product carrier (optional: water-cooled)
  • Quartz glass boats
  • Rotary drum for powder
  • Rotary drum for bulk goods
  • Aluminium plate
  • Stainless steel plate
  • Borosilicate glass
  • Silica glass

Electrodes

  • Single- or multi-tier
  • RIE

Controls

  • Semi-automatic
  • Rotary switch
  • PCCE control (Microsoft Windows CE)
  • PC control (Microsoft Windows POS Ready 2009)

Pressure measurement

  • Pirani
  • Capacity pressure gauge (for corrosive gas version)

Timer

  • Digital

Generators

Frequencies:

  • 40 kHz: power 0 - 100 W; 0 - 1000 W
  • 100 kHz: power 500 W
  • 80 kHz: power 1000 W
  • 13.56 MHz: power 0 - 200 W
  • 2.45 GHz: power 0 - 100 W; 0 - 300 W

All generators are infinitely adjustable from 0 - 100%

Vacuum pumps

  • In different sizes and from different manufacturers (if required with activated carbon filter)

Additional options

Spare parts kit, pressure gauge, corrosive gas design, gas bottles, pressure reducer, heater plate, temperature display, heatable chamber, Faraday cage, plasma polymerisation accessories, test inks, oxygen generator, slow ventilation, slow pump-off, TEM sample holder flange, maintenance/service, documentation in local language, installation on site incl. training. Further options available on request.

+49 7458 99931-0

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