Nanotechnology

Nanotechnology deals with the mode of action of matter in its absolutely smallest dimensions. The name is derived from the dimensions of the relevant structures in the range of a few nanometres. One nanometre is less than ten times the diameter of an atom. Plasma technology can operate in the dimension ranges of nanometres and smaller. This is the case with plasma etching with reproducible roughness depths of a few nanometres, as well as with plasma coating.