Low-Pressure PlasmaPlasma system Tetra 150
Maximum flexibility for your production processes
The Tetra 150 low-pressure plasma system combines a generous chamber volume of 150 - 150 litres with a flexible system design. Thanks to the choice between a narrow portrait-orientation or a wide landscape-orientation design, the system can be optimally adapted to existing space constraints and different component geometries.
Start an inquiry
Flexible system design for different component geometries
With a chamber volume of 150 - 150 litres, the Tetra 150 offers sufficient space for medium-sized to large workpieces and allows several components to be processed in a single cycle.
A key feature is the choice between two housing variants. The portrait-format version is ideal for situations where floor space is limited, whilst the landscape-format version offers advantages for wide or flat components. This allows the system to be optimally adapted to production environments and material flows.
Depending on process requirements, a range of PC-based control systems and configuration options are available. Process parameters can be precisely adjusted and documented, ensuring reproducible results and a high level of process reliability.
The Tetra 150 supports low-pressure plasma technology processes such as ultra-fine cleaning, surface activation, plasma etching and functional coating of a wide variety of materials.
Cleaning
The Low-Pressure Plasma system Tetra 150 offers solutions for ultra-precise cleaning of all surfaces, for every substrate, and for every post-treatment process. Plasma cleaning removes all organic residues without subjecting the component to chemical or thermal stress.
More information
Activation
Good surface wettability is a prerequisite for the adhesion of bonding partners during painting, gluing, printing, or bonding. Plasma activation using the Low-Pressure Plasma Tetra 150 system creates polar bonding partners and increases the surface energy.
More information
Coating
The Low-Pressure Plasma Tetra 150 system can also modify surfaces by applying a coating. Plasma coating can be used to deposit hydrophobic, hydrophilic, protective, or insulating layers of any kind.
More information
Etching
The plasma technology of the Low-Pressure Plasma Tetra 150 system enables anisotropic and isotropic etching. This results in the nanostructuring of surfaces, which increases their surface area and improves adhesion.
More information
150 - 150l chamber
The Low-Pressure Plasma Tetra 150 system is equipped with a chamber volume of 150 - 150 litres, which is ideally suited to large industrial components. Stainless steel or aluminium chambers are available for this purpose, ensuring particularly safe and stable industrial processes. The generous chamber size allows for the simultaneous treatment of complex or multiple components, making the Tetra 150 ideally suited to industrial production processes and mass-production applications.
Electrode
As technology advances, so do the requirements. With Diener electronic, companies benefit from a high level of investment security, as the Tetra 150 system can be further developed to meet future requirements. Thanks to the flexible modular system, the design of the Tetra 150 can be tailored to the specific application, with a choice of single- or multi-tier electrodes, or even a specialised rotating drum solution with a drawer system. For uniform treatment of complex, larger components, it is advisable to install a single electrode. For many small components arranged across several levels, multi-tier electrodes or a rotary drum electrode are installed to ensure uniform treatment in every application.
Modular system
Drawing on years of experience and proven designs, Diener electronic has developed a unique modular system that allows the systems to be configured flexibly. To facilitate easy integration into an existing production environment, the Tetra 150 plasma system can be built in a space-saving portrait-format housing or a more spacious landscape-format housing. The appropriate housing and control unit are selected depending on the chamber size. The result is a bespoke production system for industries with demanding applications.
Control
For industrial applications, the control unit is ideally suited to a simpler, Low Cost or basic PC-based control system with pre-set processes. For demanding production environments, a full PC-based control system is available. This provides process archiving, alarm lists, remote diagnostics and network connectivity. Process transparency and traceability form the basis for efficient and cost-effective production.
Technical data
Housing dimensions
Standalone
Control unit
Low Cost PC (Windows CE)
Basic PC (Windows CE)
Full PC (Windows 11 IoT Enterprise)
Vacuum chamber
Stainless steel, Hinged door
W 400 mm x H 600 mm x D 625 mm; Volume approx. 150 liters
Aluminium, Hinged door
W 400 mm x H 600 mm x D 625 mm; Volume approx. 150 liters
Optional: Depth variably expandable up to max. 3000 mm
Aluminium, Hinged door
W 600 mm x H 400 mm x D 625 mm; Volume approx. 150 liters
Optional: Depth variably expandable up to max. 3000 mm
Generator
80.00 kHz | Power output 0 - 1000 W
80.00 kHz | Power output 0 - 3000 W
13.56 MHz | Power output 0 - 300 W
13.56 MHz | Power output 0 - 600 W
13.56 MHz | Power output 0 - 1000 W
2.45 GHz | Power output 0 - 850 W
Gas supply
MFC (Mass flow controller)
Electrode
Single-tier electrode
Multi-tier electrode
RIE electrode
Pressure measurement
Pirani sensor
Capacity pressure gauge
Power supply
400 V | 16 - 125 A
Technical changes reserved.
Get a custom quote for Low-Pressure Plasma Tetra 150?
Start an inquiryOther interesting products
FAQ Frequently Asked Questions
Is low-pressure or atmospheric-pressure plasma the better solution?
When it comes to surface treatment at Diener electronic, there is no such thing as ‘better or worse’, but rather ‘suitable or unsuitable for the application’.
Can you see through the sight glass?
Yes, depending on the material, it is possible to see inside the vacuum chamber.
How much can be applied using the Tetra 150 system during coating?
The Tetra 150 system from Diener electronic can be used to apply a coating down to the lower micrometre range (< 1 micrometre).
Which gases can be used with the Tetra 150?
The following gases can be used in the Tetra 150 and, more generally, in low-pressure plasma: O₂, N₂, Ar, ambient air, CO₂, H₂O vapour and forming gas
Can temperature-sensitive components be processed using the Tetra 150?
Yes, as this is a cold plasma, the low-pressure plasma systems Tetra 150 from Diener electronic are suitable for temperature-sensitive components.
What is the frequency of the GHz system Tetra 150?
The generators for the GHz system Tetra 150 operate at an ISM frequency of 2.45 MHz – comparable in intensity to that of a microwave. Please enquire about the safety guidelines for people with pacemakers.
Can the chamber door be opened whilst the machine is running?
Under normal circumstances, no – the negative pressure created by the vacuum pulls the door against the chamber housing.
What sets your atmospheric and low-pressure plasma surface treatment equipment, units and systems apart from those of your competitors?
The equipment and systems for plasma surface treatment from Diener electronic stand out from those of their market competitors due to:
- over 20 years’ experience with AD and 30 years’ experience with ND in a variety of production environments at our customers’ sites, thanks to the reliability of the technology
- several thousand systems already installed
- compact design
- modern communication protocols are available on PC models, such as Profinet, EtherCAT, etc.
