Tetra 150

Low-pressure plasma systems

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Tetra 150 plasma systems are primarily used in the following sectors:

  • Archaeology
  • Automotive
  • Life sciences
  • Elastomer technology
  • Electrical engineering
  • Electron microscopy
  • Precision engineering
  • Research and development
  • Semiconductor technology
  • Small batch production
  • Plastics Technology
  • Medical engineering
  • Micro-system technology
  • Solar cell technology
  • Textile technology

Different models

Model 1

Model 1, standard system
BASIC PC control in basic unit type A
Vacuum chamber rectangular, stainless steel, hinged door
(W: 400 mm, D: 625 mm, H: 600 mm)
Gas supply:
MFC

Model 2

Model 2, standard system
FULL PC control in basic unit type A
Vacuum chamber rectangular, stainless steel, hinged door
(W: 400 mm, D: 625 mm, H: 600 mm)
Gas supply:
MFC

Model 3

Model 3, standard system
BASIC PC control in basic unit type A
(W 600 mm x D 800 mm x H 2,100 mm)
Vacuum chamber rectangular, stainless steel, hinged door
(W: 400 mm, D: 625 mm, H: 600 mm)
Gas supply:
MFC

Model 4

Model 4, corrosive gas system (e.g. for fluorinated process gases)
FULL PC control in basic unit type A
(W 600 mm x D 800 mm x H 2,100 mm)
Vacuum chamber rectangular, stainless steel, hinged door
(W: 400 mm, D: 625 mm, H: 600 mm)
Gas supply:
MFC

Model 5

Model 5, plasma polymerisation system
BASIC PC control in basic unit type A
(W 600 mm x D 800 mm x H 2,100 mm)
Vacuum chamber rectangular, stainless steel, hinged door
(W: 400 mm, D: 625 mm, H: 600 mm)
Gas supply:
Needle valve

Model 6

Model 6, plasma polymerisation system
FULL PC control in basic unit type A
(W 600 mm x D 800 mm x H 2,100 mm)
Vacuum chamber rectangular, stainless steel, hinged door
(W: 400 mm, D: 625 mm, H: 600 mm)
Gas supply:
Needle valve

Technical data

Basic equipment

  • Housing sizes vary depending on components/options
  • Chamber volume: depending on the version, 150 litres
  • Voltage supply: 230 V or 400 V / 3 phases

Gas supply

  • Mass flow controllers (MFCs)

Vacuum chambers

  • Stainless steel rectangular, hinged door (approx. W 400 mm x H 600 mm x D 625 mm)
  • Rectangular aluminium chamber, hinged door (approx. W 400 mm x H 600 mm x D 625 mm)

Charge

  • Products carrier (optionally, water-cooled), quartz glass boats, powder rotary drum, bulk goods rotary drum, aluminium panel, stainless steel, borosilicate glass, quartz glass

Electrodes

  • Single- or multi-tier
  • RIE electrode with gas shower

Controls

  •     PCCE control (Microsoft Windows CE)
  •     PC control (Microsoft Windows 10 IoT)

Pressure measurement

  • Pirani
  • Capacity pressure gauge (for corrosive gas version)

Timer

  • integrated in the PC

Generators

Frequencies:

  • 80 kHz: power 1000 - 3000 W
  • 13.56 MHz: power 0 - 300 W; 0 - 600 W; 0 - 1000 W
  • 2.45 GHz: power 0 - 1200 W

All generators are infinitely adjustable from 0 - 100%

Vacuum pumps

  • In different sizes and from different manufacturers (if required with activated carbon filter)

Additional options

Spare parts kit, pressure gauge, corrosive gas design, gas bottles, pressure reducer, heater plate, temperature display, heatable chamber, Faraday cage, plasma polymerisation accessories, test inks, oxygen generator, slow ventilation, slow pump-off, TEM sample holder flange, maintenance/service, documentation in local language, installation on site incl. training. Further options available on request.

+49 7458 99931-0

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