Pico

LOW-PRESSURE PLASMA SYSTEMS (PLASMACLEANER)

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Plasma system for cleaning, aktivating, coating, etching
 

The Pico plasma systems can be combined in different variants in a modular manner. Below, please find an overview over the most common options using the Pico plasma systems. Pico plasma systems are primarily used in the following sectors:

  • Analytics (SEM, TEM)
  • Archaeology
  • Automotive
  • Research and development departments
  • Semiconductor technology
  • Small batch production
  • Plastics Technology
  • Medical engineering
  • Micro-system technology
  • Sensor technology
  • Sterilising
  • Textile technology
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Technical data

Basic equipment

  •     Housing sizes vary depending on components/options
  •     Chamber volume: depending on the version, 4 to 15 litres
  •     Voltage supply: 230 V for table unit, 400 V / 3 phases for stand-alone unit

Gas supply

  •     Needle valves
  •     Mass flow controller (MFCs)

Vacuum chambers

  • Stainless steel round with cover (approx. ∅ 150 mm, L 320 mm or L 600 mm)
  •     Stainless steel rectangular, hinged door (approx. W 160 mm x H 160 mm x D 325 mm or 600 mm)
  •     Aluminium rectangular, hinged door (approx. ∅ 160 mm x 160 mm, L 325 mm or L 600 mm)
  •     Quartz glass (UHP) round with lid or hinged door (approx. ∅ 130 mm, L 300 mm or L 600 mm)
  •     Borosilicate glass (UHP) round with lid or with hinged door (approx. ∅ 130 mm, L 300 mm or L 600 mm)

Charge

  • Products carrier (optionally, water-cooled), quartz glass boats, powder rotary drum, bulk goods rotary drum, aluminium panel, stainless steel, borosilicate glass, quartz glass

Electrodes

  •     Single- or multi-tier
  •     RIE

Control

  •     Semi-automatic
  •     Basic PC control (Microsoft Windows CE)
  •     Full PC control (Windows 10 IoT)

Pressure measurement

  •     Pirani
  •     Capacity pressure gauge (for corrosive gas version)

Timer

  • Digital

Generators

Frequencies:

  • 40 kHz: power 0 - 200 W; 0 - -1000 W
  • 100 kHz: power 500 W
  • 80 kHz: power 1000 W
  • 13.56 MHz: power   0 - 100 W; 0 - 300 W
  • 2.45 GHz: power 0 - 300 W

All generators are infinitely adjustable from 0 - 100 %

Vacuum pumps

  • In different sizes and from different manufacturers (if required with activated carbon filter)

Additional options

Spare parts kit, pressure gauge, corrosive gas design, gas bottles, pressure reducer, heater plate, temperature display, heatable chamber, Faraday cage, plasma polymerisation accessories, test inks, oxygen generator, slow ventilation, slow pump-off, TEM sample holder flange, maintenance/service, documentation in local language, installation on site incl. training. Further options available on request.

+49 7458 99931-0

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