Tetra 320R

LOW-PRESSURE PLASMA SYSTEMS (PLASMACLEANER)

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The  Tetra 320R production system with its chamber volume of 320 litres and PC control is used in series production (cleaning, etching and activation):

Technical data

Control cabinet: W 870 mm, H (with feet) 1860 mm, D 1400 mm

Chamber: ∅ 640 mm, D 1000 mm

Chamber volume: approx. 320 litres

Gas supply: 2 gas channels via MFCs

Generator: 1 pc. (80 kHz/ 1000 Watt)

Control: PC control (Windows)

Parts holding fixture: according to customer requirements

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