In homogeneous low-pressure plasma, high volumes of items can be treated in parallel in plasma chamber in serial production. For this purpose, rotary drums or magazines are often used.
A magazine is a multi-tier holder on which a large number of small parts can be placed in a specific arrangement. This allows for optimum utilisation of the chamber volume while placing each part to be treated in a defined position. If contact between the parts during the process is to be avoided or for mechanically highly sensitive parts, use of magazines instead of rotary drums yields better results. Magazines are used for various purposes such as plasma cleaning, plasma etching or plasma coating of microelectronic components such as ICs and lead frames. verwendet.