Glossary of surface technology

Ultra-fine cleaning

Using plasma processes to remove coarse dirt is not recommended because the removal speed is not very high in a plasma cleaning process. Mechanical and wet-chemical cleaning processes are better suited for coarse cleaning. The major benefit of plasma cleaning is that minute contaminations in deeply hidden spots are removed just as easily as dirt on freely accessible surfaces. Cleaning in an oxygen plasma removes even the smallest residues of hydrocarbons (oils, greases, waxes, release agents). During overetching, it may cause slight surface etching of the topmost atomic layers, which improves the adhesion of prints, paint coats and bonds. This applies analogously to micromechanical ultra-fine cleaning via micro-sandblasting.

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