Glossary of surface technology
Plasma system
Total system for carrying out a plasma treatment. It always comprises:
- a plasma generator
- and lines for supplying power and the process gas to the plasma generator,
- as well as an electric control.
Special features of the low-pressure plasma system
The plasma generator is a high-frequency generator. Further components of the plasma system are a pressure-tight plasma chamber and a vacuum system. Depending on the plasma process to be executed, different plasma generators are used. High-frequency electrodes (plate electrodes or tubular electrodes) or a magnetron in case of excitation by microwave radiation. Various other components can be used as options:- pressure sensors
- control valves
- exhaust filters
- electrical shields (Faraday cage)
- polymer evaporator
- product carriers
Special features atmospheric plasma
The plasma generator is a high-voltage generator. For plasma excitation, the plasma generator has two corona electrodes between which a gas discharge is initiated by the high voltage. The process gas is supplied at high pressure.
