Photoresist ashing

In the treatment of printed circuit boards by means of photolithography processes, plasma technology is of great significance. After forming the conductors, the photoresist layer must be removed selectively. In accordance with the state of the art technology, this is done by plasma etching. erfolgt. To this end, the photoresist is decomposed in gaseous degradation products (ashed) extracted by the vacuum pump. abgesaugt werden. For efficient processing, a high treatment speed is a key factor. A plasma stripper or plasma asher is a plasma system optimised for this type of application.

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