Glossary of surface technology

Vapour deposition

Coating processes (PVD process) for separating metals, alloys or chemical compounds by supply of thermal energy or particles bombardment in a high vacuum, i.e. the coating material is transferred by different methods from the solid into the vapour phase before it condenses on the surface of a substrate. The PVD processes also include ion plating and cathode sputtering (sputtering). To implement PVD systems, vacuum plants for generating high-vacuum pressures <10-5 mbar are required.

You can find out more about vapour deposition under: Thin film technology and metallisation

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