An electrode is an electrically charged conductive component. Between an electrode and electric conductors of other charges, in general a second electrode, an electric field is formed. These electric fields also excite technical plasma, Here, a differentiation must be made between
- high voltage electrodes generating local field strengths high enough to generate a plasma by gas discharge, for example in the generation of a corona or an atmospheric pressure plasma, and
- high-frequency electrodes used to excite a plasma by means of high-frequency alternating fields. With excitation frequencies between the kilohertz and gigahertz bands , a plasma can be generated in the vacuum at lower field strengths. In this way, homogeneous plasmas can be generated in high volumes.