Nano

LOW-PRESSURE PLASMA SYSTEMS (PLASMACLEANER)

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The Nano plasma systems can be combined in different variants in a modular manner. Below, please find an overview over the most common options using the Nano plasma systems. Nano plasma systems are primarily used in the following sectors:

Analytics, archaeology, automotive, research and development departments, semiconductor technology, small-series manufacture, plastics technology, medical engineering, micro-system engineering, sensory technology, sterilising, textile technology

Technical data

Basic equipment

  •     Housing sizes vary depending on components/options
  •     Chamber volume: depending on the version, 18 to 36 litres
  •     Voltage supply: 230 V for table unit, 400 V / 3 phases for stand-alone unit

Gas supply

  • Needle valves
  • Mass flow controllers (MFCs)

Vacuum chambers

  • Stainless steel round with cover (approx. ∅ 267 mm, L 420 mm or L 600 mm)
  • Stainless steel rectangular, hinged door (approx. W 240 mm x H 240 mm x D 420 mm or 600 mm)
  • Aluminium rectangular, hinged door (approx. ∅ 240 mm x 240 mm, L 420 mm or L 600 mm)
  • Quartz glass (UHP) round with lid or with hinged door (approx. ∅ 240 mm, L 400 mm or L 600 mm)
  • Borosilicate glass (UHP) round with lid or with hinged door (approx. ∅ 240 mm, L 400 mm or L 600 mm)

Charge

  • Products carrier (optionally, water-cooled), quartz glass boats, powder rotary drum, bulk goods rotary drum, aluminium panel, stainless steel, borosilicate glass, quartz glass

Electrodes

  •     Single- or multi-tier
  •     RIE

Controls

  •     Semi-automatic
  •     PCCE control (Microsoft Windows CE)
  •     PC control (Microsoft Windows 10 IoT)
  •     Rotary switch

Pressure measurement

  •     Pirani
  •     Capacity pressure gauge (for corrosive gas version)

Timer

  • Digital

Generators

Frequencies:

  • 100 kHz: power 500 W
  • 80 kHz: power 1000 W
  • 13.56 MHz: power 0 - 100 W; 0 - 300 W
  • 2.45 GHz: power 0 - 600 W

All generators are infinitely adjustable from 0 - 100%

Vacuum pumps

  • In different sizes and from different manufacturers (if required with activated carbon filter)

Additional options

Spare parts kit, pressure gauge, corrosive gas design, gas bottles, pressure reducer, heater plate, temperature display, heatable chamber, Faraday cage, plasma polymerisation accessories, test inks, oxygen generator, slow ventilation, slow pump-off, TEM sample holder flange, maintenance/service, documentation in local language, installation on site incl. training. Further options available on request.

+49 7458 99931-0

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