Low-Pressure PlasmaPlasma system Tetra 30
Customisable plasma system for industrial surface treatment
With a chamber volume of 28 - 57 litres, the Tetra 30 is ideally suited to plasma cleaning, surface activation, plasma etching and plasma coating of larger components as well as small production runs. The modular system design of the high-performance Tetra enables applications in research, development and industry.
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High-performance modular system concept
With a chamber volume of 28 - 57 litres, both individual workpieces and small batches can be processed efficiently. From this system size upwards, the design is exclusively a robust floor-standing system, offering optimal conditions for industrial use. The modular system allows for customised configuration of the system, tailored to your processes, materials and automation requirements.
Depending on the application, various vacuum chambers, generator power ratings and control options are available. The result is a plasma system that is precisely tailored to your requirements and also allows for future expansion.
The Tetra 30 is suitable for numerous low-pressure plasma technology processes, including ultra-fine cleaning, surface activation, plasma etching and plasma coating. This ensures that surfaces are optimally prepared for subsequent bonding, printing, painting or coating processes.
Cleaning
The Low-Pressure Plasma system Tetra 30 offers solutions for ultra-precise cleaning of all surfaces, for every substrate, and for every post-treatment process. Plasma cleaning removes all organic residues without subjecting the component to chemical or thermal stress.
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Activation
Good surface wettability is a prerequisite for the adhesion of bonding partners during painting, gluing, printing, or bonding. Plasma activation using the Low-Pressure Plasma Tetra 30 system creates polar bonding partners and increases the surface energy.
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Coating
The Low-Pressure Plasma Tetra 30 system can also modify surfaces by applying a coating. Plasma coating can be used to deposit hydrophobic, hydrophilic, protective, or insulating layers of any kind.
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Etching
The plasma technology of the Low-Pressure Plasma Tetra 30 system enables anisotropic and isotropic etching. This results in the nanostructuring of surfaces, which increases their surface area and improves adhesion.
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28 - 57l chamber
The Tetra 30 plasma system is equipped with a chamber volume of 28 - 57 litres, which is ideally suited to larger industrial components. In addition to the standard choice of an aluminium or stainless steel chamber, borosilicate or quartz glass chambers are available for applications requiring a high level of purity. These offer impressive chemical resistance, ensuring a high level of process purity. For industrial use, stainless steel or aluminium chambers are available, which ensure particularly safe and stable industrial processes.
Industry 4.0
To meet the growing demands of Industry 4.0, Diener electronic offers the Tetra 30 plasma system with an optional automatic door. This allows the Tetra 30 plasma system to be quickly integrated into an MES and optimally incorporated into automated production lines. The option of automated loading and unloading reduces the need for manual intervention, thereby increasing process reliability and enabling reproducible processes. Through automation, the Tetra 30 plasma system ensures efficient quality control.
Electrode
As technology advances, so do the requirements. With Diener electronic, companies benefit from a high level of investment security, as the Tetra 30 can be further developed to meet future requirements. Thanks to the flexible modular system, the choice between single-stage and multi-stage electrodes depends on the specific application. For larger, complex components that take up a lot of space in the chamber, an electrode that ensures uniform treatment is recommended. To ensure uniform treatment in every application, multi-tier electrodes or a rotary drum electrode are installed for many small components arranged across several tiers.
Control
For industrial applications, the Tetra 30 plasma system, combined with a simpler, Low Cost or basic PC control unit featuring pre-set processes, is the ideal solution. In demanding production environments, a full PC control system can be selected. This enables remote diagnostics, network connections and the archiving of processes and alarm lists. Efficient and cost-effective production is based on process transparency and traceability.
Technical data
Housing dimensions
Standalone
Control unit
Low Cost PC (Windows CE)
Basic PC (Windows CE)
Full PC (Windows 11 IoT Enterprise)
Vacuum chamber
Stainless steel, Hinged door
W 305 mm x H 305 mm x D 370 mm; Volume approx. 34 liters
Stainless steel, Hinged door
W 305 mm x H 300 mm x D 625 mm; Volume approx. 57 liters
Aluminium, Hinged door
W 305 mm x H 300 mm x D 370 mm; Volume approx. 34 liters
Optional: Depth variably expandable up to max. 3000 mm
Aluminium, Hinged door
W 305 mm x H 300 mm x D 625 mm; Volume approx. 57 liters
Optional: Depth variably expandable up to max. 3000 mm
Quartz glass, Hinged door
⌀ 300 mm x
D 400 mm; Volume approx. 28 liters
Borosilicate glass, Hinged door
⌀ 300 mm x
D 400 mm; Volume approx. 28 liters
Generator
40.00 kHz | Power output 0 - 1500 W
80.00 kHz | Power output 0 - 1000 W
80.00 kHz | Power output 0 - 3000 W
13.56 MHz | Power output 0 - 300 W
2.45 GHz | Power output 0 - 850 W
Gas supply
Needle valve
MFC (Mass flow controller)
Electrode
Single-tier electrode
Multi-tier electrode
RIE electrode
Pressure measurement
Pirani sensor
Capacity pressure gauge
Power supply
400 V | 16 - 125 A
Technical changes reserved.
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FAQ Frequently Asked Questions
What sets your atmospheric and low-pressure plasma surface treatment equipment, units and systems apart from those of your competitors?
The equipment and systems for plasma surface treatment from Diener electronic stand out from those of their market competitors due to:
- over 20 years’ experience with AD and 30 years’ experience with ND in a variety of production environments at our customers’ sites, thanks to the reliability of the technology
- several thousand systems already installed
- compact design
- modern communication protocols are available on PC models, such as Profinet, EtherCAT, etc.
Can you see through the sight glass?
Yes, depending on the material, it is possible to see inside the vacuum chamber.
Which surfaces can be activated using the Tetra 30 plasma system?
The Tetra 30 plasma system from Diener electronic can be used to activate the following surfaces: plastics, metals, glass, ceramics and textiles.
Are exhaust air filters required for the Tetra 30?
Yes, all systems must be connected to a proper exhaust system, regardless of the type of gas used. Nitrogen oxides, exhaust gases, fine oil mist (from oil pumps), etc. are produced, which must not be inhaled; furthermore, the gases are often acidic, meaning they accelerate the rusting of surrounding parts, machinery and equipment.
What is the typical process temperature for the Tetra 30 in the vacuum chamber?
With the Tetra 30 from Diener electronic, the temperature is normally between room temperature and approximately 80 °C – depending on the component, chamber type, process time and load quantity. Higher temperatures can be achieved on request from Diener electronic using heating elements.
What is the typical pressure range usually found in the vacuum chamber of the Tetra 30?
The typical pressure range of the Tetra 30 is adjustable from 0.1 to 1.0 mbar, depending on the defined low-pressure plasma process.
Which gases can be used with the Tetra 30?
The following gases can be used in the Tetra 30 and, more generally, in low-pressure plasma: O₂, N₂, Ar, ambient air, CO₂, H₂O vapour and forming gas
Is there an alternative to hydrogen in the Tetra 30 system?
Upon request to Diener electronic, a hydrogen generator or water vapour may be considered as an alternative to hydrogen for the Tetra 30 system.
Can the Tetra 30 system handle magnetic components?
Magnetic components can also be processed effectively in the vacuum chamber of the Tetra 30 from Diener electronic.
Can temperature-sensitive components be processed using the Tetra 30?
Yes, as this is a cold plasma, the low-pressure plasma systems Tetra 30 from Diener electronic are suitable for temperature-sensitive components.
What connectivity options are available for the software control system on the Tetra 30 system?
With its full PC control system, the Tetra 30 plasma system from Diener electronic offers the following connection options, such as:
- higher-level control systems, e.g. via Profinet
- MES systems, e.g. via OPC UA
- Database connection via ODBC
