Glossary of surface technology


TMMF is a series of dry film photoresists by the Japanese company TOK. These photoresists are not applied in liquid form but as an adhesive film. Since thicker layers (typically 5 µm - 30 µm) can be applied with TMMF than with photoresist, very deep structures can be fabricated. For this reason, TMMF is primarily used in the production of microfluid systems and MEMS. eingesetzt. Since TMMF has become the industry standard for these applications, the name is accordingly used as a synonym for dry film photoresist DFR.

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