Glossary of surface technology
Hydrogen
Diatomic gas (H2) used as a process gas in the plasma. Due to it small mass, its sputter effect is low, but it effectively removes reducible surface layers, such as surface oxides on metals. The most light-weight chemical element consisting of one proton and one electron. besteht. Heavy hydrogen (deuterium) and extra-heavy hydrogen (tritium) have one or two additional neutronsin their nucleus.
