Glossary of surface technology

2.45 GHz

Approved ISM frequency used as an operating frequency by plasma generators as well as by household microwave ovens. The resulting plasma is described as microwave plasma because of the frequency. Contrary to lower excitation frequencies, microwave radiation is not generated by electrodes but by a magnetron. The magnetron is generally outside of the actual plasma and introduces its radiation to the plasma chamber via a silica glass window.

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