Vacuum chambers made of aluminium

Unique flexible chamber system

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We, the company Diener electronic, have been manufacturing vacuum systems for 25 years. During this time, we were able to gain a huge wealth of experience and knowledge in the field of vacuum technology. We incorporate this concentrated knowledge into our current products to improve them constantly. In doing so, we also challenge things that have "always been done that way", such as the classical structure of a vacuum chamber.

The result is a unique, flexible chamber system based on extruded aluminium profiles. The three meter long profiles are cut to the desired length and equipped with a bolted rear wall and a door. Slits are provided in the side walls of the profile for easy insertion of the product carriers.

This system has great benefits:

✓ Flexible length of max. 3 meters
✓ Very fast delivery
because only door and back wall must be supplemented  
✓ Low-cost
✓ Low-weight
✓ No complicated product carrier installation required
✓Colour of your choice possible by anodising
✓ Excellent thermal conduction
✓ Highly clean processes possible, e.g. in the semiconductor field  
✓ Easy operation
✓ No welding required, parts can be easily attached
✓ Easy attachment to the existing division bars

Below, please find a list of the available profile types with the respective dimensions. If desired, it is possible to buy the profile only. 

Options available on request: Additional flanges in the chamber sides, heating, door switch, special lengths

     

    Modular aluminum vacuum chambers

    The innovation on the Market

    With our new modular chamber system, completely new doors are open to you.
    The system consists of individual, fully milled aluminum modules with a depth of 500mm. Thus the length of the chamber can be variably set in 500mm steps.

    We offer the chambers in the sizes 600mm x 600mm, 800mm x 800mm, 1000mm x 1000mm and 1200mm x 1200mm.

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    Vacuum chambers made of extruded aluminium profiles

    Model 1 | 110 x 120 mm

    Length: 300 mm or 600 mm, width: 110 mm, height: 120 mm, connectors: 3 KF 16

    Model 1: Technical drawing

    Model 2 | 150 x 160 mm

    Length: 325 mm or 600 mm, width: 150 mm, height: 160 mm, connections: 4 KF 16 and 1 KF 40

    Model 2: Technical drawing

    Model 3 | 240 x 240 mm

    Length: 420 mm or 600 mm, width: 240 mm, height: 240 mm, connections: 2 KF 16 and 3 KF 40

    Model 3: Technical drawing

    Model 4 | 305 x 300 mm

    Length: 370 mm or 620 mm, width: 305 mm, height: 300 mm, connections: 1 KF 16 and 5 KF 40

    Model 4: Technical drawing

    Model 5 | 572 x 125 mm

    Length: 300 mm or 650 mm, width: 572 mm, height: 125 mm, 1 KF 16 and 4 KF 40

    Model 5: Technical drawing

    Model 6 | 400 x 600 mm

    Width: 400 mm, height: 600 mm, length: 625 mm

    Model 6: Technical drawing

    Model 7 | Ø 700 mm

    Outer diameter: 700 mm, inner diameter: 640mm

    Model 7: Technical drawing

    Modular vacuum chambers

    Model 8 | 600 x 600 mm

    Modularly expandable in 500mm steps.
    Length: 500 mm, width: 600 mm, height: 600 mm, connections: 2 KF 16, 6 KF 40, 1 ISO K63 and 1 ISO K160

     

    Model 9 | 800 x 800 mm

    Modularly expandable in 500mm steps.
    Length: 500 mm, width: 800 mm, height: 800 mm, connections: 2 KF 16, 6 KF 40, 1 ISO K63 and 1 ISO K160

     

    Model 10 | 1000 x 1000 mm

    Modularly expandable in 500mm steps.
    Length: 500 mm, width: 1000 mm, height: 1000 mm, connections: 2 KF 16, 6 KF 40, 1 ISO K63 and 1 ISO K160

     

    Model 11 | 1200 x 1200 mm

    Modularly expandable in 500mm steps.
    Length: 500 mm, width: 1200 mm, height: 1200 mm, connections: 2 KF 16, 6 KF 40, 1 ISO K63 and 1 ISO K160

     

    Vacuum chambers

    STAINLESS STEEL, ALUMINUM, AND GLASS CHAMBERS

    A vacuum chamber, a hermetically closed vessel, is the heart of every vacuum system. Diener electronic uses three different types of vacuum chambers: stainless steel vacuum chambers, aluminium vacuum chambers, and glass vacuum chambers. We check which vacuum chamber provides the best results for the respective application. Thus, we can always offer our customers the best solution with the matching vacuum chamber.

    Glass vacuum chambers (borosilicate or quartz)

    Borosilicate glass vacuum chambers are for high-purity plasma processes. Quartz glass vacuum chambers are for ultra high-purity plasma processes.

    Stainless steel vacuum chambers

    Stainless steel vacuum chambers are for standard plasma processes.

    Special vacuum chambers

    In accordance with DIN 12198, a UV irradiation measurement was performed on our systems (inspection glass). Result: harmless. Special vacuum chambers are available in round form with a lid and rectangular form with hinged door. Made of aluminium, they also have different opening diameters and inner dimensions. Please do not hesitate to ask for advice.

    +49 (0)7458 99931-0

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