
Atto (Low Cost / Low Budget)
Low-pressure plasma systems (PlasmaCleaner)
Start an inquiry Datasheet (PDF)The 10.5 litre LOW-COST PLASMA LAB SYSTEM ATTO with manual and Basic PC control is primarily intended for the following applications:
small-series manufacture, analytics (SEM, TEM), medical engineering, sterilising, research and development departments, archaeology, textile technology, plastics technology

























Technical data
Atto
Semi-automatic kHz / Semi-automatic MHz
Dimensions
W: 525 mm H: 257 mm D: 420 mm
Vacuum chamber
Borosilicate glass
round, Hinged door
Ø: 211 mm
D: 300 mm
Volume approx. 10.5 L
Gas supply
2 x needle valve
Generator
40 kHz | Power output 0 - 200 W
13,56 MHz | Power output 0 - 300 W
Electrode
The electrode is located outside the vacuum chamber
Control unit
Semi-automatic control unit
Power supply
230 V | 50 - 60 Hz
Pressure measurement
Pirani
Pump
Suction capacity min. 6 m³/h
Atto
PC kHz / PC MHz
Dimensions
W: 525 mm H: 257 mm D: 420 mm
Vacuum chamber
Borosilicate glass
round, Hinged door
Ø: 211 mm
D: 300 mm
Volume approx. 10.5 L
Gas supply
2 x MFC
Generator
40 kHz | Power output 0 - 200 W
13,56 MHz | Power output 0 - 300 W
Electrode
The electrode is located outside the vacuum chamber
Control unit
7" Basic PC control unit (Windows Embedded Compact 7)
Power supply
230 V | 50 - 60 Hz
Pressure measurement
Pirani
Pump
Suction capacity min. 6 m³/h