Atto (Low Cost / Low Budget)

Low-pressure plasma systems (PlasmaCleaner)

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Our big one among the little ones

The 10.5 litre LOW-COST PLASMA LAB SYSTEM ATTO with manual and Basic PC control is primarily intended for the following applications:

small-series manufacture, analytics (SEM, TEM), medical engineering, sterilising, research and development departments, archaeology, textile technology, plastics technology

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Technical data

Semi-automatic kHz / Semi-automatic MHz

Dimensions

W: 525 mm H: 257 mm D: 420 mm

Vacuum chamber

Borosilicate glass round, Hinged door
Ø: 211 mm D: 300 mm Volume approx. 10.5 L

Gas supply

2 x needle valve

Generator

40 kHz | Power output 0 - 200 W

13,56 MHz | Power output 0 - 300 W

Electrode

The electrode is located outside the vacuum chamber

Control unit

Semi-automatic control unit

Power supply

230 V | 50 - 60 Hz

Pressure measurement

Pirani

Pump

Suction capacity min. 6 m³/h

PC kHz / PC MHz

Dimensions

W: 525 mm H: 257 mm D: 420 mm

Vacuum chamber

Borosilicate glass round, Hinged door
Ø: 211 mm D: 300 mm Volume approx. 10.5 L

Gas supply

2 x MFC

Generator

40 kHz | Power output 0 - 200 W

13,56 MHz | Power output 0 - 300 W

Electrode

The electrode is located outside the vacuum chamber

Control unit

7" Basic PC control unit (Windows Embedded Compact 7)

Power supply

230 V | 50 - 60 Hz

Pressure measurement

Pirani

Pump

Suction capacity min. 6 m³/h

+49 7458 99931-0

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