can also be excited by high-frequency electric fields. The higher the excitation frequency and the lower the gas pressure, the easier the excitation of the plasma, and the less energy is required. In low-pressure plasma
technology, the plasma is excited by electromagnetic high-frequency fields. The following special feature is found here:
- In the evacuated plasma chamber (vacuum chamber), a plasma can be excited in almost any gaseous substance.
- The plasma excited by high frequency is cold
In plasma technology, the excitation is carried out by the approved ISM frequencies 40 kHz, 13.56 MHz or2.45 GHz.