In electronics and telecommunication technology, the term “high-frequency” refers to high frequencies of the electric current and electric and/or magnet fields. High-frequency alternating fields are used to excite low-pressure plasma. eingesetzt. High voltage is not required. With high-frequency excitation, there is no current flow, therefore low power dissipation and above all a low temperature rise. This means that substrates with low heat resistance can be treated in low-pressure plasma with high-frequency excitation, especially almost all types of plastics. In Plasma technology only approved ISM frequencies in the kHz, MHz and GHz band can be used. Also refer to:
⇒Parallel plate reactor
⇒Generator In addition to gas discharge, high-frequency excitation is the second fundamental technology for generating a technical plasma. The particular advantage of high-frequency excitation is that there is no current flow in the plasma, and thus no high temperature and no high power dissipation. Plasma technology uses excitation frequencies in the kHz, MHz and GHz band.