Tetra 100

Low-pressure plasma systems (PlasmaCleaner)

The Tetra 100 plasma systems can be combined in different variants in a modular manner. Below, please find an overview over the most common options using the Tetra 100 plasma systems. Tetra 100 plasma systems are primarily used in the following sectors:

Analytics (SEM, TEM)
Archaeology
Automotive
Life sciences
Elastomer technology
Electrical engineering
Electron microscopy
Precision engineering
Research and development
Semiconductor technology
Small batch production
Plastics technology
Medical engineering
Micro-system technology
Solar cell technology
Textile technology

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Tetra 100, low-pressure plasma system, standalone unit

different models

Model 1

Model 1, standard system
BASIC PC control in basic unit type A
Vacuum chamber rectangular, stainless steel, hinged door
(W: 400 mm, D: 625 mm, H: 400 mm)
Gas supply:
MFC

Model 2

Model 2, standard system
FULL PC control in basic unit type A
Vacuum chamber rectangular, aluminium, hinged door
(W: 400 mm, D: 625 mm, H: 400 mm)
Gas supply:
MFC

Model 3

Model 3, plasma polymerisation system
BASIC PC control in basic unit type A
(W 850 mm x D 800 mm x H 1,700 mm)
Vacuum chamber rectangular, aluminium, hinged door
(W 400 mm, D: 625 mm, H: 400 mm)
Gas supply:
MFC

Model 4

Model 4, corrosive gas system (e.g. for fluorinated process gases)
FULL PC control in basic unit type A
(W 600 mm x D 800 mm x H 1,700 mm)
Vacuum chamber rectangular, stainless steel, hinged door
(W: 400 mm, D: 625 mm, H: 400 mm)
Gas supply:
Needle valve

Model 5

Model 5, plasma polymerisation system
BASIC PC control in basic unit type A
(W 600 mm x D 800 mm x H 1,700 mm)
Vacuum chamber rectangular, stainless steel, hinged door
(W: 400 mm, D: 625 mm, H: 400 mm)
Gas supply:
MFC

Model 6

Model 6, plasma polymerisation system
FULL PC control in basic unit type A
(W 600 mm x D 800 mm x H 1,700 mm)
Vacuum chamber rectangular, stainless steel, hinged door
(W: 400 mm, D: 625 mm, H: 400 mm)
Gas supply:
MFC

Possibilities of plasma treatment

Materials cleaning

Plasma technology offers solutions for any type of contamination, for any substrate and any post-treatment. In the process, molecular contamination residues are decomposed as well.

LEARN MORE ABOUT CLEANING

Activation of materials

Good wettability is a prerequisite for the adhesion of binding partners in painting, gluing, printing or bonding.

LEARN MORE ABOUT ACTIVATION

Etching materials

Plasma technology allows for anisotropic and isotropic etching. Isotropic etching is done by chemical etching and anisotropic etching by physical etching.

LEARN MORE ABOUT ETCHING

Coating of materials

With low-pressure plasmas, components can be tempered with various coats. This is done by supplying gaseous and liquid starting substances into the vacuum chamber.

LEARN MORE ABOUT COATING

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Technical data

Basic equipment

Housing sizes vary depending on components/options
Chamber volume: depending on the version, 80 to 100 litres
Voltage supply 230 V or 400 V / 3 phases

Gas supply

Mass flow controllers (MFCs)

Vacuum chambers

Stainless steel round, hinged door (approx. ∅ 400 mm, L 625 mm)
Stainless steel rectangular, hinged door (approx. W 400 mm x H 400 mm x D 625 mm)

Charge

Products carrier (optionally, water-cooled), quartz glass boats, powder rotary drum, bulk goods rotary drum, aluminium panel, stainless steel, borosilicate glass, quartz glass

Electrodes

Single- or multi-tier
RIE electrode with gas shower

Controls

PCCE control (Microsoft Windows CE)
PC control (Microsoft Windows 10 IoT)

Pressure measurement

Pirani
Capacity pressure gauge (for corrosive gas version)

Timer

integrated in the PC

Generators

Frequencies:

80 kHz: power 1000 - 3000 W
13.56 MHz: power 0 - 300 W; 0 - 600 W; 0 - 1000 W
2.45 GHz: power 0 - 1200 W

All generators are infinitely adjustable from 0 - 100%

Vacuum pumps

In different sizes and from different manufacturers (if required with activated carbon filter)

Additional options

Spare parts kit, pressure gauge, corrosive gas design, gas bottles, pressure reducer, heater plate, temperature display, heatable chamber, Faraday cage, plasma polymerisation accessories, test inks, oxygen generator, slow ventilation, slow pump-off, TEM sample holder flange, maintenance/service, documentation in local language, installation on site incl. training. Further options available on request.

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