Plasma systems at a glance
LOW-PRESSURE AND ATMOSPHERIC PRESSURE PLASMA SYSTEMS
Plasma technology offers a wide range of options for surface modification. We manufacture plasma systems in different versions (size, processes, controls, etc.) We differentiate between low-pressure plasma and atmospheric plasma.
Chamber volume
Housing
Generator
Controls
Example of use
Vacuum chambers
Zepto One | Plasma cleaner
Chamber volume
Ca. 1,7 litres
Housing
W 269 mm
H 176 mm
D 324 mm
H 176 mm
D 324 mm
Generator
100 kHz, 0 - 30 W
13,56 MHz, 0 - 30 W
13,56 MHz, 0 - 30 W
Controls
Manuel
Example of use
Laboratory / small series
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Zepto | plasma cleaner
Chamber volume
Ca. 1 - 4 litres
Housing
W 425 mm
H 185 mm
D 450 mm
H 185 mm
D 450 mm
Generator
• 40 kHz / 0 - 100 W
• 13,56 MHz / 0 - 200 W
• 13,56 MHz / 0 - 200 W
Controls
• Manual
• Basic PC
• Low Cost PC
• Basic PC
• Low Cost PC
Example of use
• Laboratory / small series
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Atto | plasma cleaner
Chamber volume
Ca. 10,5 litres
Housing
W 425 mm / 525 mm
H 275 mm / 257 mm
D 450 mm / 420 mm
H 275 mm / 257 mm
D 450 mm / 420 mm
Generator
• 40 kHz / 0 - 200 W
• 13,56 MHz / 0 - 300 W
• 13,56 MHz / 0 - 300 W
Controls
• Manual
• Basic PC
• Low Cost PC
• Basic PC
• Low Cost PC
Example of use
• Laboratory / small series
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Femto | plasma cleaner
Chamber volume
Ca. 2 - 3 litres
Housing
Tabel top / Stand alone
W 310 - 560 / 600 mm
H 211 - 860 / 1700 mm
D 420 - 600 / 800 mm
W 310 - 560 / 600 mm
H 211 - 860 / 1700 mm
D 420 - 600 / 800 mm
Generator
• 40 kHz / 0 - 100 W
• 100 kHz / 0 - 500 W
• 13,56 MHz / 0 - 200 W
• 2,45 GHz / 0 - 300 W
• 100 kHz / 0 - 500 W
• 13,56 MHz / 0 - 200 W
• 2,45 GHz / 0 - 300 W
Controls
• Semi-automatic
• Basic PC
• Full PC
• Basic PC
• Full PC
Example of use
• Laboratory / small series
• Production
• Production
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Pico
Chamber volume
Ca. 5 - 8 litres
Housing
Tabel top / Stand alone
W 310 - 560 / 600 mm
H 330 - 860 / 1700 mm
D 420 - 600 / 800 mm
W 310 - 560 / 600 mm
H 330 - 860 / 1700 mm
D 420 - 600 / 800 mm
Generator
• 40 kHz / 0 - 200 W
• 100 kHz / 0 - 500 W
• 13,56 MHz / 0 - 300 W (Max. 200 W)
• 2,45 GHz / 0 - 300 W
• 100 kHz / 0 - 500 W
• 13,56 MHz / 0 - 300 W (Max. 200 W)
• 2,45 GHz / 0 - 300 W
Controls
• Semi-automatic
• Basic PC
• Full PC
• Basic PC
• Full PC
Example of use
• Laboratory / small series
• Production / fully automatic
• Production / fully automatic
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Nano
Chamber volume
Ca. 18 - 24 litres
Housing
Tabel top / Stand alone
W 560 / 600 mm
H 600 - 860 / 1700 mm
D 600 / 800 mm
W 560 / 600 mm
H 600 - 860 / 1700 mm
D 600 / 800 mm
Generator
• 100 kHz / 0 - 500 W
• 80 kHz / 0 - 1000 W
• 13,56 MHz / 0 - 100 W; 0 - 300 W
• 2,45 GHz / 0 - 600 W
• 80 kHz / 0 - 1000 W
• 13,56 MHz / 0 - 100 W; 0 - 300 W
• 2,45 GHz / 0 - 600 W
Controls
• Semi-automatic
• Basic PC
• Full PC
• Basic PC
• Full PC
Example of use
• Laboratory / small series
• Production / fully automatic
• Production / fully automatic
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Tetra 30
Chamber volume
Ca. 34 - 50 litres
Housing
W 600 mm
H 1700 - 2100 mm
D 800 mm
H 1700 - 2100 mm
D 800 mm
Generator
• 40 kHz / 0 - 1500 W
• 80 kHz / 0 - 1000 W; 0- 3000 W
• 13,56 MHz / 0 - 300 W
• 2,45 GHz / 0 - 850 W
• 80 kHz / 0 - 1000 W; 0- 3000 W
• 13,56 MHz / 0 - 300 W
• 2,45 GHz / 0 - 850 W
Controls
• Basic PC
• Full PC
• Full PC
Example of use
• Laboratory / small series
• Production / fully automatic
• Production / fully automatic
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Tetra 45
Chamber volume
Ca. 45 litres
Housing
W 600 mm
H 1700 mm
D 800 mm
H 1700 mm
D 800 mm
Generator
• 80 kHz / 0 - 1000 W; 0- 3000 W
• 100 kHz / 0 - 500 W
• 13,56 MHz / 0 - 300 W
• 2,45 GHz / 0 - 850 W
• 100 kHz / 0 - 500 W
• 13,56 MHz / 0 - 300 W
• 2,45 GHz / 0 - 850 W
Controls
• Basic PC
• Full PC
• Full PC
Example of use
• Laboratory / small series
• Production / fully automatic
• Production / fully automatic
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Tetra 100
Chamber volume
Ca. 100 litres
Housing
W 600 mm
H 1700 - 2100 mm
D 800 mm
H 1700 - 2100 mm
D 800 mm
Generator
• 80 kHz / 0 - 1000; 0 - 3000 W
• 13,56 MHz / 0 - 300 W; 0 - 600 W; 0 - 1000 W
• 2,45 GHz / 0 - 1000 W
• 13,56 MHz / 0 - 300 W; 0 - 600 W; 0 - 1000 W
• 2,45 GHz / 0 - 1000 W
Controls
• Basic PC
• Full PC
• Full PC
Example of use
• Laboratory / small series
• Production / fully automatic
• Production / fully automatic
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Tetra 150
Chamber volume
Ca. 150 litres
Housing
W 600 mm
H 2100 mm
D 800 mm
H 2100 mm
D 800 mm
Generator
• 80 kHz / 0 - 1000; 0 - 3000 W
• 13,56 MHz / 0 - 300 W; 0 - 600 W; 0 - 1000 W
• 2,45 GHz / 0 - 1000 W
• 13,56 MHz / 0 - 300 W; 0 - 600 W; 0 - 1000 W
• 2,45 GHz / 0 - 1000 W
Controls
• Basic PC
• Full PC
• Full PC
Example of use
• Laboratory / small series
• Production / fully automatic
• Production / fully automatic
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Tetra 320R
Chamber volume
Ca. 320 litres
Housing
W 870 mm
H 1860 mm
D 1400 mm
H 1860 mm
D 1400 mm
Generator
80 kHz / 0 - 3000 W
Controls
• Full PC
Example of use
• Production / fully automatic
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Tetra 2800
Chamber volume
Ca. 2800 litres
Housing
Control cabinet
W 600 mm
H 1700 - 2100 mm
D 800 mm
W 600 mm
H 1700 - 2100 mm
D 800 mm
Generator
• 80 kHz / 0 - 1000; 0 - 3000 W
• 13,56 / 0 - 300 W; 0 - 600 W; 0 - 1000 W
• 2,45 GHz / 0 - 1200 W
• 13,56 / 0 - 300 W; 0 - 600 W; 0 - 1000 W
• 2,45 GHz / 0 - 1200 W
Controls
• Full PC
Example of use
• Production / fully automatic
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Tetra 120 rotary drum
Chamber volume
Ca. 120 litres
Housing
W 1000 mm
H 1850 mm
D 1000 mm
H 1850 mm
D 1000 mm
Generator
80 kHz / 0 - 1000 W
Controls
Full PC
Example of use
• Laboratory / small series
• Production / fully automatic
• Production / fully automatic
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Tetra 300 Pulveranlage
Chamber volume
approx. 300 Liter
Housing
-
Generator
80 kHz / 0 - 1000 W
Controls
Full PC
Example of use
• Production / fully automatic
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Tetra 1440
Chamber volume
approx. 1440 Liter
Housing
W: 2400 mm
H: 2130mm
D: 2000 mm
H: 2130mm
D: 2000 mm
Generator
• 80 kHz / 5000 W
Controls
• Full PC
Example of use
- Production / Fully automatic
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Tetra 12600
Chamber volume
approx. 12,600l
Housing
W: 1500mm
H: 800mm
D: 2100mm
H: 800mm
D: 2100mm
Generator
80 kHz / 0-5000W
Controls
Full PC
Example of use
Production
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Tetra 7500
Chamber volume
Housing
W: 3000mm
H: 2000mm
D: 800mm
H: 2000mm
D: 800mm
Generator
80kHz / 0-5000W
Controls
Full PC
Example of use
Production / Fully automatic
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Width of treatment
Power supply
Generator
Operation
Example of use
Plasma head
PlasmaBeam RT
Width of treatment
120 mm
Power supply
Table-top housing
W 560 mm
H 355 mm
D 540 mm
W 560 mm
H 355 mm
D 540 mm
Generator
Frequency: 40 kHz
power: ~ 2 x 300 W
power: ~ 2 x 300 W
Operation
Via elements at the front panel of the unit
Semi-automatic control: Remote control via remote connection at the rear panel of the unit
Semi-automatic control: Remote control via remote connection at the rear panel of the unit
Example of use
Laboratory / small series
Production / fully automatic
Production / fully automatic
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PlasmaBeam Mini
Width of treatment
Max. 1 - 2 mm
Power supply
W 270 mm
H 190 mm
D 320 mm
H 190 mm
D 320 mm
Generator
~ 40 kHz / 80 W
Operation
• Manual: Via buttons on the front panel
• Semiautomatic: Remote operation via remote connector on the rear panel
• Semiautomatic: Remote operation via remote connector on the rear panel
Example of use
• Laboratory
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PlasmaBeam Standard
Width of treatment
8 - 10 mm
Power supply
Table top / 19" casing
W 562 / 420 mm
H 211 / 133 mm
D 420 / 500 mm
W 562 / 420 mm
H 211 / 133 mm
D 420 / 500 mm
Generator
Ca. 40 kHz / 300 W
Operation
• Manual: Via buttons on the front panel
• Semiautomatic: Remote operation via remote connector on the rear panel
• Semiautomatic: Remote operation via remote connector on the rear panel
Example of use
• Laboratory / small series
• Production / fully automatic
• Production / fully automatic
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PlasmaBeam PC
Width of treatment
8 - 10 mm
Power supply
W 562 mm
H 210 mm
D 420 mm
H 210 mm
D 420 mm
Generator
Ca. 40 kHz / 300 W
Operation
• Manual: Via buttons on the front panel / Touchscreen
• Semiautomatic: Remote operation via remote connector on the rear panel des Gerätes
• Semiautomatic: Remote operation via remote connector on the rear panel des Gerätes
Example of use
• Laboratory / small series
• Production / fully automatic
• Production / fully automatic
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PlasmaBeam Duo
Width of treatment
8 - 10 mm / Düse
Power supply
W 562 mm
H 210 mm
D 420 mm
H 210 mm
D 420 mm
Generator
Ca. 40 kHz / 300 W (je Düse)
Operation
• Manual: Via buttons on the front panel
• Semiautomatic: Remote operation via remote connector on the rear panel
• Semiautomatic: Remote operation via remote connector on the rear panel
Example of use
• Laboratory / small series
• Production / fully automatic
• Production / fully automatic
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PlasmaBeam Quattro
Width of treatment
8 - 10 mm / Düse
Power supply
W 560 mm
H 350 mm
D 540 mm
H 350 mm
D 540 mm
Generator
Ca. 40 kHz / 300 W (je Düse)
Operation
• Manual: Via buttons on the front panel
• Semiautomatic: Remote operation via remote connector on the rear panel
• Semiautomatic: Remote operation via remote connector on the rear panel
Example of use
• Laboratory / small series
• Production / fully automatic
• Production / fully automatic
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PlasmaBeam OEM
Width of treatment
8 - 10 mm
Power supply
Table top / Zwischentransformator
W 300 / 205 mm
H 200 / 235 mm
D 300 / 115 mm
W 300 / 205 mm
H 200 / 235 mm
D 300 / 115 mm
Generator
Ca. 40 kHz / 300 W
Operation
• Semiautomatic: Remote operation via remote connector on the rear panel
Example of use
• Laboratory / small series
• Production / fully automatic
• Production / fully automatic
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Plasma APC 500
Width of treatment
Max. 50 - 60 mm
Power supply
W 562 mm
H 211 mm
D 420 mm
H 211 mm
D 420 mm
Generator
Ca. 40 kHz / 500 W
Operation
• Manual: Via buttons on the front panel
• Semiautomatic: Über SUB-D Anschluss auf der Rückplatte
• Semiautomatic: Über SUB-D Anschluss auf der Rückplatte
Example of use
• Laboratory / small series
• Production / fully automatic
• Production / fully automatic
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Plasma APC 500 Duo
Width of treatment
Max. 50 - 60 mm / Düse
Power supply
W 562 mm
H 211 mm
D 420 mm
H 211 mm
D 420 mm
Generator
Ca. 40 kHz / 500 W (je Düse)
Operation
• Manual: Via buttons on the front panel
• Semiautomatic: Über SUB-D Anschluss auf der Rückplatte
• Semiautomatic: Über SUB-D Anschluss auf der Rückplatte
Example of use
• Laboratory / small series
• Production / fully automatic
• Production / fully automatic
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