Glossary of surface technology
Plasma system
Devices to generate technical plasma for plasma treatment in industry and science.
Basic types of plasma systems are Low Pressure Plasma Systems, Atmospheric Plasma Systems (PlasmaBeam) Devices for Corona treatment and Plasma Spraying systems.
Components of a Plasma System
A Low Pressure Plasma System comprises the following basic components:
- Recipient or Plasma Chamber
- Vacuum System with the Vacuum pump
- Generator
which includes the following fixed accessories:
- Electronic control (often integrated to the plasma chamber)
- Tubes, Valves and Tube connections
- Electrodes
and a large variety of optional accessories depending on the individual application.
Components of an Atmospheric Plasma System
An atmospheric pressure Plasma System comprises the following basic components:
- Supply Block containing:
Electric and process gas supply
Electronic Control
High voltage Generator - Flexible tube containing gas auns electric conductor
- Plasma unit containing:
Nozzle
High voltage electrodes for gas discharge
and various optional accessories.
