Components of a Plasma System
A Low Pressure Plasma System comprises the following basic components:
which includes the following fixed accessories:
- Electronic control (often integrated to the plasma chamber)
- Tubes, Valves and Tube connections
and a large variety of optional accessories depending on the individual application.
Components of an Atmospheric Plasma System
An atmospheric pressure Plasma System comprises the following basic components:
- Supply Block containing:
Electric and process gas supply
High voltage Generator
- Flexible tube containing gas auns electric conductor
- Plasma unit containing:
High voltage electrodes for gas discharge
and various optional accessories.