Glossary of surface technology

GHz plasma system

Plasma systems operated by plasma generators in the frequency band of several gigahertz. For technical purposes, the ISM frequency of 2.45 MHz is approved in this band. This frequency corresponds to a wavelength in the range of micrometers, so that such a system is also referred to as a microwave plasma system, to distinguish it from RF (radio frequency) and LF (low frequency) systems or generators that operate with frequencies in the MHz or kHz band. Microwave excitation is not effected via electrodes but via a magnetron arranged outside of the plasma.

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