Control

for plasma systems

Controls are used to set the parameters for a plasma process. The following controls are available for Diener electronic plasma systems which can optionally be used for systems of all types.

Full PC control

  • The control is done via a PC
  • Operating system Windows 10 IoT
  • Two modes: Manual mode: Manual operation of the system via dialogue box. Automatic mode: Automatic execution of a previously generated process
  • 100 automatic processes can be set with 10 sub-programmes each
  • Free parameters: Pump-down pressure (until process start), max. pump-down time, gas-mass flows (ratios), process pressure, stabilization time, HF output, process duration with HF, rinse time, ventilation time

 

More information on the FULL PC control

  • The control is done via a PC
  • The PC control is integrated in the system
  • Operating system Windows 10 IoT, other systems on request
  • Compressed-air monitor
  • 100 automatic processes can be generated with 10 sub-programs each (e.g. 10-minutes cleaning with oxygen, then reduction with hydrogen)
  • Enter a comment
  • Save process data as Excel file and as diagram
  • Network board – allows automatic data export to network computer
  • Operation with Windows programs
  • Two modes: Manual mode: Manual operation of the system via dialogue box Automatic mode: Automatic execution of a previously generated process
  • Parameters: Pump-down pressure (until process start), max. pump-down time, gas-mass flows (ratios), process pressure, stabilization time, HF output, process duration with HF, rinse time, ventilation time
  • Error limits for: mass flow, process pressure, HF output
  • Digital pressure control via PI/PID controller, i.e. not only control of the mass flows but actual pressure stabilization
  • Pressure control is carried out in real time and over the entire process time
  • Indication of all process steps in real-time mode
  • Safety-related settings such as controls locked for safety reasons: While the chamber door is open pump-down is not permitted
  • Vacuum chamber: Indicates the state of the door switch, over-temperature switch and vacuum switch
  • A batch number and an operator can be entered
  • Maintenance intervals can be set individually, depending on the operating hours
  • Sensitivity adjustable for pressure control
  • Alarm archive with display of all alarms
  • Detailed error messages, e.g. the actual gas flow of gas 1 heavily deviates from the setpoint
  • Diagram also available in full screen mode
  • Programming only possible with password entry (shop floor safety)
  • All stored processes incl. file info can be viewed any time in the data archive
  • Interval specification possible for rotary drum (e. g. rotate 60 sec., stop 30 sec., rotate 60 sec., stop 30 sec.)
  • Gas supply: The setpoints for each mass flow controller (MFC) can be specified, the current actual values are displayed
  • Settings can be made process-independent but system- and customer-dependent (gas types, mass flow controllers, pressure regulators, cooling water, storage location and type)
  • Standard language selection: German, English, other languages on request AS AN OPTION
  • Signal tower (red and green signal).

 

The following options are available on request:

 

  • For the management of various electrodes, electrode monitoring can be selected (e.g. rotary drum/tier electrode)
  • Acoustic signal at the end of the process
  • Timing for evaporator
  • Regulation of the temperature indication
  • Indication of the current cooling water temperature
  • Remote diagnosis
  • Log printout via standard printer. The printer is not included in the scope of supply
  • The diagram layout can be customised
  • Monitor for DC bias source
  • Bar code reader
  • HF generator can be pulsed
  • Temperature display

 

PLC control

  • The control is done via a PC
  • Manufacturer: Siemens
  • Two modes: Manual mode: Manual operation of the system via dialogue box. Automatic mode: Automatic execution of a previously generated process
  • 100 automatic processes can be set with 10 sub-programmes each
  • Free parameters: Pump-down pressure (until process start), max. pump-down time, gas-mass flows (ratios), process pressure, stabilization time, HF output, process duration with HF, rinse time, ventilation time

 

Basic PC control

  • To control our systems, we developed a new software adjusted to the specific requirements of plasma technology
  • The PC control is based on Windows CE
  • The device has a 3.5” TFT display with touch screen (optional 7”)
  • This software allows you to run processes in manual mode and in automatic mode
  • 50 programs can be saved to this control
  • Free parameters: Pump-down pressure (until process start), max. pump-down time, gas-mass flows (ratios), process pressure, stabilization time, HF output, process duration with HF, rinse time, ventilation time

 

More information on the BASIC PC control

  • The device has a 3.5” TFT display with touch screen (optional 7”). Fully graphical coloured interface with Windows look & feel for easy, intuitive operation. Contrary to regular LCD displays without touch function, no additional membrane keyboard, e.g. with multi-tier operation, is required with this display
  • WINDOWS CE operating system
  • Two operating modes are available: automatic and manual
  • Manual mode:
    • Simply touch the respective icon to switch individual elements such as valves on and off
    • To enter setpoints, touch an assembly, e.g. the generator
    • A context dialogue is displayed in which the setpoints can be changed on the touch screen via the virtual +/- switches
  • Automatic mode:
    • For program creation, 50 program locations are available
    • Programming can be done via touch screen directly on the unit. No external programming device or PC is required
    • A program name can be assigned to each program
    • Display of the chronology of relevant process variables in the curve chart
  • Display of the current process step and the elapsed process time on the main screen
  • Display of alarms via flashing LEDs and alarm list for easy fault diagnosis
  • Multi-lingual (German/English), other languages on request
  • Ethernet network connection remote access
  • A USB port is provided for storing programs, alarms, process values etc. on USB memory sticks
  • Since the controller has no rotating parts, i.e. no hard disk or fan, it is maintenance-free
  • The boot time of the device is very short
  • Collected process data can be saved in text format on a memory card in the device and copied to a USB memory stick. Direct reading of the saved data is possible e.g. in Excel (only included if the Data logging option has been ordered)
  • With the integrated Ethernet network connection, the touch panel PC can be remote-controlled from an external PC (only included if the Remote control option has been ordered)
  • For MHz generators, we recommend FULL PC control

Rotary switch control

  • Operation of the plasma system via rotary knob is particularly easy
  • Depending on the operation mode, the control is semi-automatic or fully automatic (up to plasma treatment)
  • Turn the button clockwise up to "Process” for a fully automatic process
  • Ventilation is done manually (switch position ‘Flood’)
  • Free parameters: process time, output, gas type, pressure

 

Semi-automatic control

  • The processes are controlled semi-automatically
  • The pump, the gas flow, the plasma process and the ventilation must be started manually
  • Free parameters: process time, output, gas type, pressure

 

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