Full PC control
- The control is done via a wholesome PC
- Operating system Windows 10 IoT
- Two modes: Manual mode: Manual operation of the system via dialogue box. Automatic mode: Automatic execution of a previously generated process
- 100 automatic processes can be set with 10 sub-programmes each
- Free parameters: Pump-down pressure (until process start), max. pump-down time, gas-mass flows (ratios), process pressure, stabilization time, HF output, process duration with HF, rinse time, ventilation time
More information on the FULL PC control
- The control is done via a PC
- The PC control is integrated in the system
- Operating system Windows 10 IoT, other systems on request
- Compressed-air monitor
- 100 automatic processes can be generated with 10 sub-programs each (e.g. 10-minutes cleaning with oxygen, then reduction with hydrogen)
- Enter a comment
- Save process data as Excel file and as diagram
- Network board – allows automatic data export to network computer
- Operation with Windows programs
- Two modes: - Manual mode: Manual operation of the system via dialogue box - Automatic mode: Automatic execution of a previously generated process
- Parameters: Pump-down pressure (until process start), max. pump-down time, gas-mass flows (ratios), process pressure, stabilization time, HF output, process duration with HF, rinse time, ventilation time
- Error limits for: mass flow, process pressure, HF output
- Digital pressure control via PI/PID controller, i.e. not only control of the mass flows but actual pressure stabilization
- Pressure control is carried out in real time and over the entire process time
- Indication of all process steps in real-time mode
- Safety-related settings such as controls locked for safety reasons: While the chamber door is open pump-down is not permitted
- Vacuum chamber: Indicates the state of the door switch, over-temperature switch and vacuum switch
- A batch number and an operator can be entered
- Maintenance intervals can be set individually, depending on the operating hours
- Sensitivity adjustable for pressure control
- Alarm archive with display of all alarms
- Detailed error messages, e.g. the actual gas flow of gas 1 heavily deviates from the setpoint
- Diagram also available in full screen mode
- Programming only possible with password entry (shop floor safety)
- All stored processes incl. file info can be viewed any time in the data archive
- Interval specification possible for rotary drum (e. g. rotate 60 sec., stop 30 sec., rotate 60 sec., stop 30 sec.)
- Gas supply: The setpoints for each mass flow controller (MFC) can be specified, the current actual values are displayed
- Settings can be made process-independent but system- and customer-dependent (gas types, mass flow controllers, pressure regulators, cooling water, storage location and type)
- Standard language selection: German, English, other languages on request AS AN OPTION
- Signal tower (red and green signal).
The following options are available on request:
- For the management of various electrodes, electrode monitoring can be selected (e.g. rotary drum/tier electrode)
- Acoustic signal at the end of the process
- Timing for evaporator
- Regulation of the temperature indication
- Indication of the current cooling water temperature
- Remote diagnosis
- Log printout via standard printer. The printer is not included in the scope of supply
- The diagram layout can be customised
- Monitor for DC bias source
- Bar code reader
- HF generator can be pulsed
- Temperature display
Low Cost / Basic PC control
- To control our systems, we developed a new software adjusted to the specific requirements of plasma technology
- The PC control is based on Windows CE
- The device has a 7” TFT display with touch screen
- This software allows you to run processes in manual mode and in automatic mode
- 20 / 50 programs can be saved to this control
- Free parameters: Pump-down pressure (until process start), max. pump-down time, gas-mass flows (ratios), process pressure, stabilization time, HF output, process duration with HF, rinse time, ventilation time
More information on the BASIC PC control
- The device has a 7” TFT display with touch screen. Fully graphical coloured interface with Windows look & feel for easy, intuitive operation. Contrary to regular LCD displays without touch function, no additional membrane keyboard, e.g. with multi-tier operation, is required with this display
- WINDOWS CE operating system
- Two operating modes are available: automatic and manual
- Manual mode:
- Simply touch the respective icon to switch individual elements such as valves on and off
- To enter setpoints, touch an assembly, e.g. the generator
- A context dialogue is displayed in which the setpoints can be changed on the touch screen via the virtual +/- switches
- Automatic mode:
- For program creation, 50 program locations are available
- Programming can be done via touch screen directly on the unit. No external programming device or PC is required
- A program name can be assigned to each program
- Display of the chronology of relevant process variables in the curve chart
- Display of the current process step and the elapsed process time on the main screen
- Display of alarms via flashing LEDs and alarm list for easy fault diagnosis
- Multi-lingual (German/English), other languages on request
- Ethernet network connection remote access
- A USB port is provided for storing programs, alarms, process values etc. on USB memory sticks
- Since the controller has no rotating parts, i.e. no hard disk or fan, it is maintenance-free
- The boot time of the device is very short
- Collected process data can be saved in text format on a memory card in the device and copied to a USB memory stick. Direct reading of the saved data is possible e.g. in Excel (only included if the Data logging option has been ordered)
- With the integrated Ethernet network connection, the touch panel PC can be remote-controlled from an external PC (only included if the Remote control option has been ordered)
- For MHz generators, we recommend FULL PC control
