Glossary of surface technology


Removal of hydrocarbon layers by plasma etching. The polymers are broken down into fragments which are themselves gaseous or react with the active species of the plasma to gaseous molecules. which are extracted by the vacuum pump. In industry, this technology is significant for photoresist ashing in semiconductor technology.

+49 7458 99931-0

Get an expert on the phone

Write us what we can do for you

Request a quotation

You know exactly what you’re looking for