Glossary of surface technology

Sulphur hexafluoride

Sulphur hexafluoride (SF6) is an absolutely inert gas under regular conditions; however, used as a process gas in the plasma , it forms highly reactive fluorine atoms and sulphur fluoride radicals which makes it one of the most aggressive plasma process gases (also see Tetrafluormethane).

+49 7458 99931-0

Get an expert on the phone

Write us what we can do for you

Request a quotation

You know exactly what you’re looking for