Zepto (Low Cost / Low Budget)

LOW-PRESSURE PLASMA SYSTEMS (PLASMA CLEANER)

Plasma system - Plasma cleaning, Plasma activation

Technical data

The 2.6 litre LOW-COST PLASMA LAB SYSTEM ZEPTO with manual, PC, and PCCE control is primarily intended for the following applications:
Small batch production, Analytics (SEM, TEM), Medical engineering, Sterilising, Research and development departments, Archaeology, Textile technology, Plastics technology

Basic equipment

Housing sizes vary depending on components/options
Chamber volume: depending on the version, 1.7 to 2.6 litres
Voltage supply 230 V

Gas supply

Needle valves
Mass flow controller (MFCs)

Vacuum chambers

Quartz glass (UHP) round with cover (approx. ∅ 105 mm, L 200 mm or L 300 mm)
Borosilicate glass (UHP) round with cover (approx. ∅ 105 mm, L 200 mm or L 300 mm)
W6 (approx. ∅ 160 mm, L 180mm)

Charge

Product carriers: Aluminium panel, stainless steel, borosilicate glass, quartz glass

Electrodes

Single- or multi-tier
A pair of electrodes outside of the vacuum chamber

Controls

Manual
PCCE control (Microsoft Windows CE)
PC control (Microsoft Windows POS Ready 2009)
Rotary switch

Pressure measurement

Pirani

Timer

digital
analogue

Generators

Frequencies:

40 kHz: power 0 - 100 W
13.56 MHz: power 0 - 200 W

Additional options

Spare parts kit, pressure gauge, corrosive gas design, gas bottles, pressure reducer, Faraday cage, plasma polymerisation accessories, test inks, oxygen generator, slow ventilation, slow pump-off, maintenance/service, documentation in local language, installation on site incl. training. Further options available on request.

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Model 1 base unit type A incl. manual control

Generator
(100 kHz, 0 - 30 W)
Vacuum chamber
(round, borosilicate glass, cover, Ø approx. 105 mm.
Length: 200 mm, volume: approx. 1.7 litre)
Gas supply
needle valve

Model 2 base unit type A incl. manual control

Generator
(40 kHz, 0 - 100 W)
Vacuum chamber
(round, borosilicate glass, cover, Ø approx. 105 mm.
Length: 300 mm, volume: approx. 2.6 litre)
Gas supply
needle valve

Model 3 base unit type B incl. rotary switch control

Generator
(40 kHz, 0 - 100 W)
Vacuum chamber
(round, borosilicate glass, cover, Ø approx. 105 mm.
Length: 300 mm, volume: approx. 2.6 litre)
Gas supply
needle valve

Model 4 base unit type B incl. Basic PC control (Windows CE)

Generator
(40 kHz, 0 - 100 W)
Vacuum chamber
(round, borosilicate glass, cover, Ø approx. 105 mm.
Length: 300 mm, volume: approx. 2.6 litre)
Gas supply
MFC

Model 5 base unit type C external low-cost PC control (Windows 10 Prof.)

Generator
(40 kHz, 0 - 100 W)
Vacuum chamber
(round, borosilicate glass, cover, Ø approx. 105 mm.
Length: 300 mm, volume: approx. 2.6 litre)
Gas supply
MFC

Model 6 base unit type D low-cost PC control (Windows 10 IoT)

Generator
(40 kHz, 0 - 100 W)
Vacuum chamber
(round, borosilicate glass, cover, Ø approx. 105 mm.
Length: 300 mm, volume: approx. 2.6 litre)
Gas supply
MFC

Model 7 base unit type A incl. manual control

Generator
(13.56 MHz, 0 - 30 W, fixed matching)
Vacuum chamber
(round, borosilicate glass, cover, Ø approx. 105 mm.
Length: 200 mm, volume: approx. 1.7 litre)
Gas supply
needle valve

Model 8 base unit type B incl. rotary switch control

Generator
(13.56 MHz, 0 - 300 W, automatic matching)
Vacuum chamber
(round, borosilicate glass, cover, Ø approx. 105 mm.
Length: 300 mm, volume: approx. 2.6 litre)
Gas supply
needle valve

Model 9 base unit type C incl. Basic PC control (Windows CE)

Generator
(13.56 MHz, 0 - 300 W, automatic matching)
Vacuum chamber
(round, borosilicate glass, cover, Ø approx. 105 mm.
Length: 300 mm, volume: approx. 2.6 litre)
Gas supply
MFC

Model 10 base unit type D incl. low-cost PC control (Windows 10 Prof.)

Generator
(13.56 MHz, 0 - 300 W, automatic matching)
Vacuum chamber
(round, borosilicate glass, cover, Ø approx. 105 mm.
Length: 300 mm, volume: approx. 2.6 litre)
Gas supply
MFC

Model 11 base unit type E incl. low-cost PC control (Windows 10 IoT)

Generator
(13.56 MHz, 0 - 300 W, automatic matching)
Vacuum chamber
(round, borosilicate glass, cover, Ø approx. 105 mm.
Length: 300 mm, volume: approx. 2.6 litre)
Gas supply
MFC

Zepto RIE standard type A incl. manual control

Generator
(40kHz, 0 - 100 W, automatic matching)
Vacuum chamber RIE
(round, aluminium, cover, Ø approx. 190 mm.
Height: 60 mm, volume: approx. 1 litre)
Gas supply
needle valve

Plasma processes

Materials cleaning

Plasma technology offers solutions for any type of contamination, for any substrate and any post-treatment. In the process, molecular contamination residues are decomposed as well.

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