Zepto (Low Cost / Low Budget)

LOW-PRESSURE PLASMA SYSTEMS (PLASMA CLEANER)

Plasma system - Plasma cleaning, Plasma activation

Technical data

The 2.6 litre LOW-COST PLASMA LAB SYSTEM ZEPTO with manual, PC, and PCCE control is primarily intended for the following applications:
Small batch production, Analytics (SEM, TEM), Medical engineering, Sterilising, Research and development departments, Archaeology, Textile technology, Plastics technology

Basic equipment

Housing sizes vary depending on components/options
Chamber volume: depending on the version, 1.7 to 2.6 litres
Voltage supply 230 V

Gas supply

Needle valves
Mass flow controller (MFCs)

Vacuum chambers

Borosilicate glass (UHP) round with cover (approx. ∅ 105 mm, L 200 mm or L 300 mm)
W6 (approx. ∅ 160 mm, L 180mm)

Charge

Product carriers: Aluminium panel, stainless steel, borosilicate glass

Electrodes

Single- or multi-tier
A pair of electrodes outside of the vacuum chamber

Controls

Manual
PCCE control (Microsoft Windows CE)
Rotary switch

Pressure measurement

Pirani

Timer

digital
analogue

Generators

Frequencies:

40 kHz: power 0 - 100 W
13.56 MHz: power 0 - 200 W

Additional options

Spare parts kit, pressure gauge, corrosive gas design, gas bottles, pressure reducer, Faraday cage, plasma polymerisation accessories, test inks, oxygen generator, slow ventilation, slow pump-off, maintenance/service, documentation in local language, installation on site incl. training. Further options available on request.

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Plasma processes

Materials cleaning

Plasma technology offers solutions for any type of contamination, for any substrate and any post-treatment. In the process, molecular contamination residues are decomposed as well.

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