Zepto (Low Cost / Low Budget)

Low-pressure plasma systems (Plasma Cleaner)

 

Technical data

The 2.6 litre LOW-COST PLASMA LAB SYSTEM ZEPTO with manual, PC, and PCCE control is primarily intended for the following applications:
Small batch production, Analytics (SEM, TEM), Medical engineering, Sterilising, Research and development departments, Archaeology, Textile technology, Plastics technology

Basic equipment

  •    Housing sizes vary depending on components/options
  •     Chamber volume: depending on the version, 1.7 to 2.6 litres
  •    Voltage supply 230 V

Gas supply

  •     Needle valves
  •     Mass flow controller (MFCs)

Vacuum chambers

  •     Quartz glass (UHP) round with cover (approx. ∅ 105 mm, L 200 mm or L 300 mm)
  •     Borosilicate glass (UHP) round with cover (approx. ∅ 105 mm, L 200 mm or L 300 mm)
  •     W6 (approx. ∅ 160 mm, L 180mm)

Charge

  • Product carriers: Aluminium panel, stainless steel, borosilicate glass, quartz glass

Electrodes

  • Single- or multi-tier
  • A pair of electrodes outside of the vacuum chamber

Controls

  •     Manual
  •     PCCE control (Microsoft Windows CE)
  •     PC control (Microsoft Windows POS Ready 2009)
  •     Rotary switch

Pressure measurement

  •     Pirani

Timer

  • digital 
  • analogue 

Generators

Frequencies:

  • 40 kHz: power 0 - 100 W
  • 13.56 MHz: power 0 - 200 W

Additional options

Spare parts kit, pressure gauge, corrosive gas design, gas bottles, pressure reducer, Faraday cage, plasma polymerisation accessories, test inks, oxygen generator, slow ventilation, slow pump-off, maintenance/service, documentation in local language, installation on site incl. training. Further options available on request.

Plasma cleaner Zepto Model 1 base unit type A incl. manual control

Model 1 base unit type A incl. manual control

Generator
(100 kHz, 0 - 30 W)
Vacuum chamber
(round, borosilicate glass, cover, Ø approx. 105 mm.
Length: 200 mm, volume: approx. 1.7 litre)
Gas supply 
needle valve

Plasma cleaner Zepto Model 2 base unit type A incl. manual control

Model 2 base unit type A incl. manual control

Generator
(40 kHz, 0 - 100 W)
Vacuum chamber
(round, borosilicate glass, cover, Ø approx. 105 mm.
Length: 300 mm, volume: approx. 2.6 litre)
Gas supply
needle valve

Plasma cleaner Zepto Model 3 base unit type B incl. rotary switch control

Model 3 base unit type B incl. rotary switch control

Generator
(40 kHz, 0 - 100 W)
Vacuum chamber
(round, borosilicate glass, cover, Ø approx. 105 mm.
Length: 300 mm, volume: approx. 2.6 litre)
Gas supply
needle valve

Plasma cleaner Zepto Model 4 base unit type B incl. Basic PC control (Windows CE)

Model 4 base unit type B incl. Basic PC control (Windows CE)

Generator
(40 kHz, 0 - 100 W)
Vacuum chamber
(round, borosilicate glass, cover, Ø approx. 105 mm.
Length: 300 mm, volume: approx. 2.6 litre)
Gas supply
MFC

Plasma cleaner Zepto Model 5 base unit type C external low-cost PC control (Windows 10 Prof.)

Model 5 base unit type C external low-cost PC control (Windows 10 Prof.)

Generator
(40 kHz, 0 - 100 W)
Vacuum chamber
(round, borosilicate glass, cover, Ø approx. 105 mm.
Length: 300 mm, volume: approx. 2.6 litre)
Gas supply
MFC

Plasma cleaner Zepto Model 6 base unit type D low-cost PC control (Windows 10 IoT)

Model 6 base unit type D low-cost PC control (Windows 10 IoT)

Generator
(40 kHz, 0 - 100 W)
Vacuum chamber
(round, borosilicate glass, cover, Ø approx. 105 mm.
Length: 300 mm, volume: approx. 2.6 litre)
Gas supply
MFC

Plasma cleaner Zepto Model 7 base unit type A incl. manual control

Model 7 base unit type A incl. manual control

Generator
(13.56 MHz, 0 - 30 W, fixed matching)
Vacuum chamber
(round, borosilicate glass, cover, Ø approx. 105 mm.
Length: 200 mm, volume: approx. 1.7 litre)
Gas supply
needle valve

Plasma cleaner Zepto Model 8 base unit type B incl. rotary switch control

Model 8 base unit type B incl. rotary switch control

Generator
(13.56 MHz, 0 - 300 W, automatic matching)
Vacuum chamber
(round, borosilicate glass, cover, Ø approx. 105 mm.
Length: 300 mm, volume: approx. 2.6 litre)
Gas supply
needle valve

Plasma cleaner Zepto Model 9 base unit type C incl. Basic PC control (Windows CE)

Model 9 base unit type C incl. Basic PC control (Windows CE)

Generator
(13.56 MHz, 0 - 300 W, automatic matching)
Vacuum chamber
(round, borosilicate glass, cover, Ø approx. 105 mm.
Length: 300 mm, volume: approx. 2.6 litre)
Gas supply
MFC

Plasma cleaner Zepto Model 10 base unit type D incl. low-cost PC control (Windows 10 Prof.)

Model 10 base unit type D incl. low-cost PC control (Windows 10 Prof.)

Generator
(13.56 MHz, 0 - 300 W, automatic matching)
Vacuum chamber
(round, borosilicate glass, cover, Ø approx. 105 mm.
Length: 300 mm, volume: approx. 2.6 litre)
Gas supply
MFC

Plasma cleaner Zepto Model 11 base unit type E incl. low-cost PC control (Windows 10 IoT)

Model 11 base unit type E incl. low-cost PC control (Windows 10 IoT)

Generator
(13.56 MHz, 0 - 300 W, automatic matching)
Vacuum chamber
(round, borosilicate glass, cover, Ø approx. 105 mm.
Length: 300 mm, volume: approx. 2.6 litre)
Gas supply
MFC

Plasma cleaner Zepto RIE standard type A incl. manual control

Zepto RIE standard type A incl. manual control

Generator
(40kHz, 0 - 100 W, automatic matching)
Vacuum chamber RIE
(round, aluminium, cover, Ø approx. 190 mm.
Height: 60 mm, volume: approx. 1 litre)
Gas supply
needle valve

Possibilities of plasma treatment

Materials cleaning

Plasma technology offers solutions for any type of contamination, for any substrate and any post-treatment. In the process, molecular contamination residues are decomposed as well.

LEARN MORE ABOUT CLEANING

Activation of materials

Good wettability is a prerequisite for the adhesion of binding partners in painting, gluing, printing or bonding.

LEARN MORE ABOUT ACTIVATION

+49 7458 99931-0

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info@plasma.com

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