Glossary of surface technology Home Process technology Glossary Epilamisation Epilamisation To ensure permanent movability without any maintenance, components must be lubricated for life. Oil lubrican
Glossary of surface technology Home Process technology Glossary Seal Seal Seals are elements or structures which prevent or restrict undesirable passage of substances. Furthermore, seals can be insula
Glossary of surface technology Home Process technology Glossary EPDM EPDM Ethylene-propylene-diene copolymer (synthetic rubber with saturated main chain). Thermoplastic processable plastic with elasti
Glossary of surface technology Home Process technology Glossary Sensitivity Sensitivity Sensitivity is a unit to measure the degree of reactivity caused by an external input. This input for example ca
Glossary of surface technology Home Process technology Glossary DRIE DRIE Deep Reactive Ion Etching. Anisotropic reactive ion etching in silicon with etching depth of max. 100 µm. By passivation of th
Glossary of surface technology Home Process technology Glossary Electrode Electrode An electrode is an electrically charged conductive component. Between an electrode and electric conductors of other
processes, a potential-free plasma is required, or it is necessary to prevent the action of ions and electrons , for example to keep the substrate for getting charged. To implement this, the substrate is put
Process technology Glossary ESCA ESCA Acronym for "Electron Spectroscopy for Chemical Analysis", a technology also referred to as IEE (Induced Electron Emission) or XP(E)S (X-Ray induced Photoelectron
Glossary of surface technology Home Process technology Glossary Epitaxy Epitaxy Deposited coatings can grow on crystal substrates with a well-defined orientation with respect to the crystalline substr
a-C:H coats, metallic and thus conductive Me-DLC or Me-C:H coats, and DLC or a-C:H:X coats modified with non-metallic elements. By means of plasma coating in PACVD processes using acetylene C 2 H 2 as
