Edwards vacuum pump iQDP 80 QMB 500 (dry-running) plasma etcher
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Edwards vacuum pump iQDP 80 QMB 500 (dry-running)

Pumping speed: 3905 m3 h-1

Drive motor: 4.0 kW + 2.2 kW

Final pressure without gas ballast: 2 x 10-3 mbar

Suction flange: ISO 100

Outlet flange: DN 40 KF

Oil charge: 0.4 l

Weight: 299 kg