used: Plasma system Tetra 30 LF
Used plasma system Tetra 30 for process development, cleaning, activation, etching in small batches - plasma systems

Plasma system Tetra 30 LF, used

Technical data

Housing
W 600 mm, H 1600 mm, D 800 mm

Chamber
Stainless steel, rectangular,
hinged door
(approx. W 300 mm, H 290 mm, D 370 mm)

Chamber volume:
approx. 32 litres

Gas supply
4 gas channels via needle valves

Generator
1 piece (40 kHz)

Control
semi-automatic