Plasma system Tetra 30 LF, used
Used plasma system Tetra 30 for process development, cleaning, activation, etching in small batches - Diener plasma systems

Plasma system Tetra 30 LF, used

Technical data

Housing
W 570 mm, H 730 mm, D 570 mm

Chamber
Stainless steel, rectangular,
hinged door
(approx. W 300 mm, H 290 mm, D 370 mm)

Chamber volume:
approx. 32 litres

Gas supply
via Mass Flow Controller (MFCs)

Generator
1 piece (40 kHz)

Control
PC (Microsoft Windows POS Ready 2009)