Used Pico plasma system, for process development, cleaning, activation
Used Pico plasma system, for process development, cleaning, activation, etching in small batches - Diener plasma systems

Pico plasma system, used

Technical data

Housing
W 560 mm, H 330 mm, D 500 mm

Chamber
borosilicate glass
(approx. 130 mm diameter x L 300 mm)

Chamber volume:
approx. 5.74 litres

Gas supply
via needle valve

Generator
1 piece (200 W)

Control
semi-automatic