Used Nano plasma system, for process development, cleaning, activation, etching in small batches - Diener plasma systems

Nano plasma system, used

Technical data

Housing
W 600 mm, H 2000 mm, D 800 mm

Chamber
Quartz glass (UHP), hinged door
(approx. ∅ 240 mm, D 390 mm)

Chamber volume:
approx. 24 litres

Gas supply
2 gas channels via needle valves
12 gas channels via mass flow controllers (MFCs)

Generator
1 piece (2.45 GHz, 0 - 1500 W)

Control
semi-automatic